USD616394SActiveUtility

Support of wafer boat for manufacturing semiconductor wafers

Assignee: TOKYO ELECTRON LTDPriority: Mar 6, 2009Filed: Sep 2, 2009Granted: May 25, 2010

Est. expiryMar 6, 2029(~2.6 yrs left)· nominal 20-yr term from priority

PatentIndex Score

446

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Claims

exact text as granted — not AI-modified

The ornamental design for a support of wafer boat for manufacturing semiconductor wafers, as shown and described.

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