USD609655SActiveUtility

Electrostatic chuck

Assignee: NGK INSULATORS LTDPriority: Oct 3, 2008Filed: Mar 19, 2009Granted: Feb 9, 2010

Est. expiryOct 3, 2028(~2.2 yrs left)· nominal 20-yr term from priority

PatentIndex Score

596

Cited by

References

Claims

exact text as granted — not AI-modified

The ornamental design for an electrostatic chuck, as shown and described.

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