USD604257SExpiredUtility

Heater for semiconductor manufacturing

26
Assignee: TOKYO ELECTRON LTDPriority: Oct 27, 2005Filed: Apr 27, 2006Granted: Nov 17, 2009
Est. expiryOct 27, 2025(expired)· nominal 20-yr term from priority
Inventors:Yasuhiro InatomiKenichi YamagaHiroyuki Honma
26
PatentIndex Score
1
Cited by
6
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a heater for semiconductor manufacturing, as shown and described.

Join the waitlist — get patent alerts

Track USD604257S — get alerts on status changes and closely related new filings.

We store only your email — no account needed. See our privacy policy.