USD589474SActiveUtility

Wafer holding member

85
Assignee: TOKYO ELECTRON LTDPriority: Jun 6, 2007Filed: Dec 6, 2007Granted: Mar 31, 2009
Est. expiryJun 6, 2027(~0.8 yrs left)· nominal 20-yr term from priority
Inventors:Ikuo OgasawaraMunetoshi Nagasaka
85
PatentIndex Score
34
Cited by
9
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a wafer holding member, as shown and described.

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