USD586768SActiveUtility

Process tube for manufacturing semiconductor wafers

86
Assignee: TOKYO ELECTRON LTDPriority: Oct 12, 2006Filed: Apr 11, 2007Granted: Feb 17, 2009
Est. expiryOct 12, 2026(~0.2 yrs left)· nominal 20-yr term from priority
Inventors:Hisashi InoueAtsushi Endo
86
PatentIndex Score
35
Cited by
10
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a process tube for manufacturing semiconductor wafers, as shown and described.

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