USD564462SExpiredUtility

RF electrode for a process tube of semiconductor manufacturing apparatus

46
Assignee: TOKYO ELECTRON LTDPriority: Dec 27, 2005Filed: Jun 2, 2006Granted: Mar 18, 2008
Est. expiryDec 27, 2025(expired)· nominal 20-yr term from priority
Inventors:Katsutoshi IshiiHiroyuki Matsuura
46
PatentIndex Score
6
Cited by
5
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a RF electrode for a process tube of semiconductor manufacturing apparatus, as shown and described.

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