USD548200SExpiredUtility

Attracting disc for an electrostatic chuck for semiconductor production

Assignee: TOKYO ELECTRON LTDPriority: Sep 29, 2005Filed: Dec 19, 2005Granted: Aug 7, 2007

Est. expirySep 29, 2025(expired)· nominal 20-yr term from priority

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Claims

exact text as granted — not AI-modified

CLAIM 
     
       The ornamental design for an attracting disc for an electrostatic chuck for semiconductor production, as shown and described.

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