USD494551SExpiredUtility

Exhaust ring for manufacturing semiconductors

Assignee: TOKYO ELECTRON LTDPriority: Dec 12, 2002Filed: Jun 12, 2003Granted: Aug 17, 2004
Est. expiryDec 12, 2022(expired)· nominal 20-yr term from priority
Inventors:Shigeki Doba
75
PatentIndex Score
23
Cited by
9
References
1
Claims

Claims

exact text as granted — not AI-modified
I claim the ornamental design for exhaust ring for manufacturing semiconductors, as shown and described.

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