USD493873SExpiredUtility

Heating gas supplier for semiconductor manufacturing equipment

Assignee: TOKYO ELECTRON LTDPriority: May 24, 2002Filed: Nov 21, 2002Granted: Aug 3, 2004

Est. expiryMay 24, 2022(expired)· nominal 20-yr term from priority

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exact text as granted — not AI-modified

I claim the ornamental design for heating gas supplier for semiconductor manufacturing equipment, as shown and described.

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