USD489740SExpiredUtility

Electrostatic chuck

Assignee: NGK SPARK PLUG COPriority: Dec 20, 2002Filed: Jun 20, 2003Granted: May 11, 2004

Est. expiryDec 20, 2022(expired)· nominal 20-yr term from priority

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Claims

exact text as granted — not AI-modified

The ornamental design for a electrostatic chuck, as shown and described.

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