USD425919SUtility

Electrostatic chuck with improved spacing mask and workpiece detection device

64
Priority: —Filed: Nov 14, 1997Granted: May 30, 2000
64
PatentIndex Score
48
Cited by
3
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for an electrostatic chuck with improved spacing mask and workpiece detection device, as shown.

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