USD424583SExpiredUtility

Hinge unit for vacuum-processing a semiconductor wafer

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Assignee: TOKYO ELECTRON LTDPriority: Oct 21, 1997Filed: Apr 21, 1998Granted: May 9, 2000
Est. expiryOct 21, 2017(expired)· nominal 20-yr term from priority
Inventors:Masami Mizukami
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PatentIndex Score
4
Cited by
4
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for a hinge unit for vacuum-processing a semiconductor wafer, as shown.

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