USD406571SExpiredUtility

Liquid crystal display substrate conveying arm structure for a semiconductor manufacturing device

Assignee: TOKYO ELECTRON LTDPriority: Jun 26, 1997Filed: Dec 24, 1997Granted: Mar 9, 1999
Est. expiryJun 26, 2017(expired)· nominal 20-yr term from priority
Inventors:Tatsuya Iwasaki
30
PatentIndex Score
0
Cited by
3
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for liquid crystal display substrate conveying arm structure for a semiconductor manufacturing device, as shown and described.

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