USD366868SExpiredUtility

Wafer boat or rack

Assignee: TOKYO ELECTRON LTDPriority: Sep 29, 1993Filed: Sep 29, 1993Granted: Feb 6, 1996
Est. expirySep 29, 2013(expired)· nominal 20-yr term from priority
Inventors:Tetu Ohsawa
83
PatentIndex Score
28
Cited by
5
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for wafer boat or rack, as shown and described.

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