USD1110288SActiveUtility

Heat insulation pedestal of a semiconductor manufacturing apparatus

19
Assignee: KOKUSAI ELECTRIC CORPPriority: Mar 20, 2024Filed: Mar 20, 2024Granted: Jan 27, 2026
Est. expiryMar 20, 2044(~17.6 yrs left)· nominal 20-yr term from priority
Inventors:JINDEN TATSUKI
19
PatentIndex Score
0
Cited by
28
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for heat insulation pedestal of a semiconductor manufacturing apparatus, as shown and described.

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