USD1069863SActiveUtility

Deposition ring of a process kit for semiconductor substrate processing

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Assignee: APPLIED MATERIALS INCPriority: Aug 4, 2022Filed: Aug 4, 2022Granted: Apr 8, 2025
Est. expiryAug 4, 2042(~16 yrs left)· nominal 20-yr term from priority
Inventors:Abhishek ChowdhuryNataraj Bhaskar RaoEdwin C. SuarezHarisha SathyanarayanaDiego Ramiro Puente SotomayorQanit TakmeelMohammad Kamruzzaman ChowdhuryArun Chakravarthy Chakravarthy
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PatentIndex Score
4
Cited by
57
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a deposition ring of a process kit for semiconductor substrate processing, as shown and described.

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