USD1053830SActiveUtility

Wafer support of semiconductor manufacturing apparatus

22
Assignee: KOKUSAI ELECTRIC CORPPriority: Mar 4, 2022Filed: Aug 5, 2022Granted: Dec 10, 2024
Est. expiryMar 4, 2042(~15.6 yrs left)· nominal 20-yr term from priority
Inventors:Daiki Taniguchi
22
PatentIndex Score
0
Cited by
29
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a wafer support of semiconductor manufacturing apparatus, as shown and described.

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