Protective film detecting method for laser processing

Abstract

Disclosed herein is a protective film detecting method of detecting the formed condition of a protective film formed on the front side of a workpiece. The protective film detecting method includes a fluorescence intensity measuring step of forming a plurality of reference protective films having different thicknesses on the front sides of a plurality of reference workpieces, next applying excitation light absorbable by an absorbing agent contained in each reference protective film to each reference protective film, and next measuring the intensity of fluorescence emitted from the absorbing agent due to the absorption of the excitation light, and a threshold deciding step of deciding a threshold of the fluorescence intensity corresponding to a desired one of the different thicknesses of the reference protective films according to the fluorescence intensity measured above.

What is claimed is: 
     
       1. A protective film detecting method of detecting the formed condition of a protective film formed on a front side of a workpiece, so as to protect the front side of said workpiece from processing dust generated in laser-processing said workpiece by applying a pulsed laser beam having a wavelength in an ultraviolet region or visible region to said workpiece, said protective film being formed of a water-soluble resin containing an absorbing agent capable of absorbing said pulsed laser beam, said protective film detecting method comprising:
 a fluorescence intensity measuring step of forming a plurality of reference protective films having different thicknesses on the front sides of a plurality of reference workpieces, next applying excitation light absorbable by said absorbing agent to said reference protective films, and next measuring the intensity of fluorescence emitted from said absorbing agent contained in each reference protective film due to the absorption of said excitation light; 
 a threshold deciding step of deciding a threshold of the fluorescence intensity corresponding to a desired one of said different thicknesses of said reference protective films according to the fluorescence intensity measured in said fluorescence intensity measuring step; and 
 a determining step of applying said excitation light to said protective film formed on the front side of said workpiece, next measuring the intensity of fluorescence emitted from said absorbing agent contained in said protective film due to the absorption of said excitation light, next comparing the fluorescence intensity from said absorbing agent contained in said protective film with said threshold decided in said threshold deciding step, and next determining whether or not said protective film has said desired thickness. 
 
     
     
       2. The protective film detecting method according to  claim 1 , wherein the wavelength of said pulsed laser beam is 355 nm;
 the wavelength of said excitation light is in the range of 355 to 400 nm; and 
 the peak wavelength of said fluorescence at which the fluorescence intensity becomes a peak value is longer than the wavelength of said excitation light and falls within the range of 365 to 600 nm. 
 
     
     
       3. The protective film detecting method according to  claim 1 , wherein the wavelength of said pulsed laser beam is 532 nm;
 the wavelength of said excitation light is in the range of 480 to 600 nm; and 
 the peak wavelength of said fluorescence at which the fluorescence intensity becomes a peak value is longer than the wavelength of said excitation light and falls within the range of 570 to 700 nm.