Methods, equipment and systems for measuring radio frequency crosstalk

Abstract

Method, equipment and systems for measuring a radio frequency crosstalk are disclosed. The method includes: adjusting an impedance value of a matching network associated with a radio frequency electrode (including an anode and a cathode) in a plasma enhanced chemical vapor deposition (PECVD) system, and/or adjusting an impedance value of a radio frequency energy generating equipment associated with the radio frequency electrode, so that the sum of the impedance value of the matching network and the impedance value of the radio frequency electrode is the same as the impedance value of the radio frequency energy generating equipment; measuring an electrical signal received by the radio frequency electrode by the reversibility of energy transfer between the radio frequency electrode and the radio frequency energy generating equipment; and determining the energy of radio frequency crosstalk that the radio frequency electrode is subjected to according to the measured electrical signal.

What is claimed is: 
     
       1. A method for measuring radio frequency crosstalk, comprising:
 adjusting an impedance value of a matching network associated with a radio frequency electrode in a plasma enhanced chemical vapor deposition (PECVD) system, and/or adjusting an impedance value of a radio frequency energy generating equipment associated with the radio frequency electrode, so that a sum of the impedance value of the matching network and a impedance value of the radio frequency electrode is substantially the same as the impedance value of the radio frequency energy generating equipment; 
 suspending transmission of radio frequency energy from the radio frequency energy generation equipment to the radio frequency electrode, and detecting the electrical signal received by the radio frequency electrode during the suspending transmission of radio frequency energy from the radio frequency energy generation equipment to the radio frequency electrode; and 
 determining an energy of a radio frequency crosstalk at least based on the electrical signal received. 
 
     
     
       2. The method according to  claim 1 , wherein the electrical signal received by the radio frequency electrode comprises one or more types of radio frequency energy radiated by other radio frequency electrodes in the PECVD system and received by the radio frequency electrode and radio frequency energy leaked in a radio frequency transmission line and received by the radio frequency electrode. 
     
     
       3. The method according to  claim 1 , wherein adjusting the impedance value of the matching network associated with the radio frequency electrode in the PECVD system comprises:
 fixing an output frequency of the radio frequency energy generating equipment associated with the radio frequency electrode in the PECVD system, and adjusting the impedance value of the matching network associated with the radio frequency electrode in the PECVD system. 
 
     
     
       4. The method according to  claim 1 , wherein adjusting the impedance value of the radio frequency energy generating equipment associated with the radio frequency electrode in the PECVD system comprises:
 fixing the impedance value of the matching network associated with the radio frequency electrode in the PECVD system, and adjusting the impedance value of the radio frequency energy generating equipment associated with the radio frequency electrode in the PECVD system. 
 
     
     
       5. The method according to  claim 1 , wherein adjusting the impedance value of the radio frequency energy generating equipment associated with the radio frequency electrode in the PECVD system comprises:
 fixing the impedance value of the matching network associated with the radio frequency electrode in the PECVD system, and adjusting an output frequency of the radio frequency energy generating equipment associated with the radio frequency electrode in the PECVD system. 
 
     
     
       6. The method according to  claim 5 , wherein adjusting the output frequency of the radio frequency energy generating equipment associated with the radio frequency electrode in the PECVD system comprises:
 adjusting the output frequency of the radio frequency energy generating equipment associated with the radio frequency electrode in the PECVD system within a frequency range of 1 to 1,000 MHz. 
 
     
     
       7. The method according to  claim 1 , wherein the received electrical signal comprises a current signal and/or a voltage signal. 
     
     
       8. The method according to  claim 1 , wherein the determining the energy of the radio frequency crosstalk that the radio frequency electrode is subjected to according to the measured electrical signal comprises:
 calculating a radio frequency energy value generated by the measured electrical signal according to the measured electrical signal, and taking the calculated radio frequency energy value as the energy of the radio frequency crosstalk that the radio frequency electrode is subjected to. 
 
     
     
       9. An equipment for determining radio frequency crosstalk, comprising:
 an adjusting module, configured for adjusting an impedance value of a matching network associated with a radio frequency electrode in a plasma enhanced chemical vapor deposition (PECVD) system or adjusting an impedance value of a radio frequency energy generating equipment associated with the radio frequency electrode, so that a sum of the impedance value of the matching network and a impedance value of the radio frequency electrode is substantially the same as the impedance value of the radio frequency energy generating equipment; 
 a measurement module, configured for instructing the radio frequency energy generating equipment to suspend transmission of radio frequency energy to the radio frequency electrode and detecting the electrical signal received by the radio frequency electrode; and measuring an electrical signal received by the radio frequency electrode during radio frequency energy generating equipment suspending transmission of radio frequency energy to the radio frequency electrode; and 
 a calculation module, configured for determining an energy of a radio frequency crosstalk based at least on the electrical signal received. 
 
     
     
       10. The equipment according to  claim 9 , wherein the electrical signal received by the radio frequency electrode comprises one or more types of radio frequency energy radiated by other radio frequency electrodes in the PECVD system and received by the radio frequency electrode and radio frequency energy leaked in a radio frequency transmission line and received by the radio frequency electrode. 
     
     
       11. The equipment according to  claim 9 , wherein the adjusting module is configured for fixing an output frequency of the radio frequency energy generating equipment associated with the radio frequency electrode in the PECVD system and adjusting the impedance value of the matching network associated with the radio frequency electrode in the PECVD system. 
     
     
       12. The equipment according to  claim 9 , wherein the adjusting module is configured for fixing the impedance value of the matching network associated with the radio frequency electrode in the PECVD system and adjusting an output frequency of the radio frequency energy generating equipment associated with the radio frequency electrode in the PECVD system. 
     
     
       13. The equipment according to  claim 9 , wherein the adjusting module is configured for fixing the impedance value of the matching network associated with the radio frequency electrode in the PECVD system and adjusting the impedance value of the radio frequency energy generating equipment associated with the radio frequency electrode in the PECVD system. 
     
     
       14. A method for determining interference in a PECVD system, the method comprising:
 measuring a first impedance value of an RF source and an second impedance value of an electrode; 
 providing a matching module, the matching module being electrically coupled to the RF source and electrode, the matching module being characterized by a third impedance value, the third impedance value being adjustable; 
 adjusting the third impedance value at least based on the first impedance value and the second impedance value; 
 suspending transmission of radio frequency energy from the RF source to the electrode, and measuring an electrical signal received by the electrode during suspending transmission of radio frequency energy from the RF source to the electrode; and 
 determining a crosstalk energy based on the electrical signal received. 
 
     
     
       15. The method  claim 14  further comprising adjusting the first impedance value and/or the third impedance value to maximize a plasma energy level associated with the electrode.