US9337341B2ExpiredUtilityA1

Semiconductor device having aluminum-containing layer between two curved substrates

Assignee: SEMICONDUCTOR ENERGY LABPriority: Dec 28, 2001Filed: Mar 13, 2015Granted: May 10, 2016
Est. expiryDec 28, 2021(expired)· nominal 20-yr term from priority
H10P 72/7432H10P 72/7426H10W 10/181H10P 90/1914H10P 72/0428H10P 72/74G02F 1/133305G02F 1/1339G02F 1/1341Y02E10/549G02F 1/1368G02F 1/13394H10D 86/60H10D 86/411H10D 86/441H10D 86/0214H10D 86/0212H10D 86/40H10D 86/021H10D 30/6758H10D 30/0321H10D 30/0314H10H 29/142H01L 2221/68363H01L 51/003H01L 21/76251H01L 21/6835H01L 2924/3025H01L 27/1259H01L 51/0097H01L 27/156H01L 29/66757H01L 2227/326H01L 51/56H01L 27/1214H01L 27/3244H01L 29/78603H01L 27/3276H01L 51/0024H01L 27/1266H01L 21/67092H01L 2221/6835H01L 27/3248H01L 2924/30105H01L 27/1218H01L 27/124H01L 21/2007H10K 59/131H10K 77/111H10K 59/123H10K 59/1201H10K 71/50H10K 59/1213H10K 71/80H10K 2102/311
76
PatentIndex Score
1
Cited by
303
References
16
Claims

Abstract

The object of the invention is to provide a method for fabricating a semiconductor device having a peeled layer bonded to a base material with curvature. Particularly, the object is to provide a method for fabricating a display with curvature, more specifically, a light emitting device having an OLED bonded to a base material with curvature. An external force is applied to a support originally having curvature and elasticity, and the support is bonded to a peeled layer formed over a substrate. Then, when the substrate is peeled, the support returns into the original shape by the restoring force, and the peeled layer as well is curved along the shape of the support. Finally, a transfer object originally having curvature is bonded to the peeled layer, and then a device with a desired curvature is completed.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
       1. A semiconductor device comprising:
 a first substrate with curvature; 
 an adhesive over the first substrate; 
 an oxide layer over the adhesive; 
 a layer comprising wiring lines and pixel electrodes over the oxide layer; 
 a second substrate with curvature over the layer; and 
 a film including aluminum between the adhesive and the oxide layer. 
 
     
     
       2. The semiconductor device according to  claim 1 , wherein the film including the aluminum is an aluminum nitride film or an aluminum nitride oxide film. 
     
     
       3. The semiconductor device according to  claim 1 , wherein each of the first substrate and the second substrate has an elasticity. 
     
     
       4. The semiconductor device according to  claim 1 , wherein a curvature radius of each of the first substrate and the second substrate is 50 cm to 200 cm. 
     
     
       5. The semiconductor device according to  claim 1 , wherein the semiconductor device is flexible. 
     
     
       6. The semiconductor device according to  claim 1 , wherein the layer further comprises a transistor. 
     
     
       7. The semiconductor device according to  claim 1 , wherein the layer further comprises a liquid crystal. 
     
     
       8. The semiconductor device according to  claim 1 , wherein the layer further comprises a light emitting material. 
     
     
       9. A semiconductor device comprising:
 a first substrate with curvature; 
 an adhesive over the first substrate; 
 an oxide layer over the adhesive; 
 a layer comprising wiring lines and pixel electrodes over the oxide layer; 
 a second substrate with curvature over the layer; and 
 a film having a thermal conductivity between the adhesive and the oxide layer, 
 wherein the film having the thermal conductivity includes aluminum. 
 
     
     
       10. The semiconductor device according to  claim 9 , wherein the film having the thermal conductivity is an aluminum nitride film or an aluminum nitride oxide film. 
     
     
       11. The semiconductor device according to  claim 9 , wherein each of the first substrate and the second substrate has an elasticity. 
     
     
       12. The semiconductor device according to  claim 9 , wherein a curvature radius of each of the first substrate and the second substrate is 50 cm to 200 cm. 
     
     
       13. The semiconductor device according to  claim 9 , wherein the semiconductor device is flexible. 
     
     
       14. The semiconductor device according to  claim 9 , wherein the layer further comprises a transistor. 
     
     
       15. The semiconductor device according to  claim 9 , wherein the layer further comprises a liquid crystal. 
     
     
       16. The semiconductor device according to  claim 9 , wherein the layer further comprises a light emitting material.

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