US9171744B2ActiveUtilityA1

Attaching passive components to a semiconductor package

Assignee: MARVELL WORLD TRADE LTDPriority: Jan 12, 2010Filed: Mar 23, 2015Granted: Oct 27, 2015
Est. expiryJan 12, 2030(~3.5 yrs left)· nominal 20-yr term from priority
H10W 90/754H10W 90/734H10W 90/728H10W 90/722H10W 74/00H10W 72/07536H10W 72/07254H10W 72/07236H10W 72/5445H10W 72/01225H10W 72/884H10W 72/859H10W 72/242H10W 90/00H10W 74/117H10W 74/114H10W 72/00H10W 74/016H01L 2224/16268H01L 21/565H01L 24/11H01L 2224/48091H01L 24/85H01L 2224/48227H01L 24/81H01L 2224/11334H01L 2924/15321H01L 2224/16113H01L 2224/85801H01L 2224/81801H01L 2924/1205H01L 2224/48235H01L 2224/48106H01L 25/16
64
PatentIndex Score
1
Cited by
24
References
20
Claims

Abstract

Embodiments of the present disclosure provide a method comprising forming an electrically conductive structure on a surface of a semiconductor die, attaching the semiconductor die to a substrate, forming a molding compound to encapsulate the semiconductor die, forming an opening in the molding compound, the opening to at least partially expose the electrically conductive structure, and electrically coupling a passive component to the electrically conductive structure through the opening in the molding compound. Other embodiments may be described and/or claimed.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
       1. A method comprising:
 forming (i) a first electrically conductive structure formed on an active surface of the semiconductor die and (ii) a second electrically conductive structure formed on the active surface of the semiconductor die, and wherein the first electrically conductive structure provides (i) a power connection for the semiconductor die, or (ii) a ground connection for the semiconductor die; 
 attaching the semiconductor die to a substrate; 
 forming a single molding compound disposed to substantially encapsulate both the substrate and the semiconductor die, including substantially encapsulating the active surface of the semiconductor die, wherein the molding compound has a channel formed in the molding compound; 
 forming an opening in the molding compound, wherein the channel (i) extends from the active surface of the semiconductor die to the opening on the molding compound and (ii) at least partially includes the second electrically conductive structure formed on the active surface of the semiconductor die; 
 attaching a passive component to the molding compound at least partly over the opening on the exterior surface of the molding compound; and 
 electrically coupling the passive component to the active surface of the semiconductor die via the second electrically conductive structure through the channel in the molding compound. 
 
     
     
       2. The method of  claim 1 , wherein the second electrically conductive structure comprises a bump that is disposed to form (i) an electrical connection or (ii) part of an electrical connection between the passive component and the semiconductor die. 
     
     
       3. The method of  claim 1 , wherein the second electrically conductive structure comprises a land that is disposed to form part of an electrical connection between the passive component and the semiconductor die. 
     
     
       4. The method of  claim 1 , wherein the semiconductor die is attached to the substrate by physically coupling an inactive surface of the semiconductor die to the substrate using an adhesive. 
     
     
       5. The method of  claim 1 , wherein the first electrically conductive structure includes a bonding wire and the active surface of the semiconductor die is electrically coupled to the substrate using the bonding wire. 
     
     
       6. The method of  claim 1 , wherein the active surface of the semiconductor die comprises a low-k dielectric material. 
     
     
       7. The method of  claim 1 , wherein the opening is formed using an etch process to remove portions of the molding compound. 
     
     
       8. The method of  claim 1 , wherein the opening is formed using a laser process to remove portions of the molding compound. 
     
     
       9. The method of  claim 1 , wherein electrically coupling the passive component to the electrically conductive structure comprises:
 depositing solderable material onto the second electrically conductive structure such that the solderable material is disposed within the opening; 
 positioning the passive component (i) on or (ii) adjacent to the solderable material; and 
 heating the solderable material to form an electrical connection between the passive component and the second electrically conductive structure. 
 
     
     
       10. The method of  claim 1 , wherein electrically coupling the passive component to the second electrically conductive structure comprises:
 depositing solderable material onto the passive component; 
 positioning the passive component over the opening such that the solderable material is disposed (i) adjacent to or (ii) within the opening; and 
 heating the solderable material to form an electrical connection between the passive component and the second electrically conductive structure. 
 
     
     
       11. The method of  claim 1 , wherein the passive component comprises a capacitor to supply additional current to the semiconductor die. 
     
     
       12. The method of  claim 1 , wherein the passive component is substantially disposed on the molding compound over the opening. 
     
     
       13. The method of  claim 1 , further comprising:
 attaching a solder ball to the substrate, wherein the solder ball routes electrical signals of the semiconductor die to and/or from the substrate. 
 
     
     
       14. The method of  claim 1 , wherein the second electrically conductive structure includes a material comprising solder disposed within the channel. 
     
     
       15. The method of  claim 1 , wherein the passive component is substantially disposed external to the molding compound. 
     
     
       16. The method of  claim 1 , wherein the passive component comprises a capacitor that supplies additional current to the semiconductor die. 
     
     
       17. The method of  claim 1 , further comprising:
 attaching a solder ball coupled to the substrate, wherein the solder ball routes electrical signals of the semiconductor package to and/or from an electronic device. 
 
     
     
       18. The method of  claim 1 , wherein the passive component is disposed at least partly on a portion of the molding compound that substantially encapsulates the active surface of the semiconductor die. 
     
     
       19. The method of  claim 1 , wherein the opening is a first opening, and wherein the method further comprises:
 forming a second opening on the external surface of the molding compound; and 
 electrically coupling the passive component to the active surface of the semiconductor die through both the first opening and the second opening in the molding compound. 
 
     
     
       20. The method of  claim 1 , wherein an entirety of the molding compound is formed prior to the passive component being attached to the semiconductor die.

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