Display device

Abstract

Disclosed is a display device and an electronic apparatus incorporating the display device. The display device includes a transistor and a planarization film over the transistor. The planarization film has an opening where an edge portion is rounded. The display device further includes a first electrode over the planarization film and an organic resin film over the first electrode. The organic resin film also has an opening where an edge portion is rounded. The organic resin film is located in the opening of the planarization film. The first electrode and the transistor are electrically connected to each other through a conductive film. The first electrode is in contact with a top surface of the conductive film. Over the first electrode, a light-emitting member and a second electrode are provided.

What is claimed is: 
     
       1. A display device comprising:
 a first insulating film comprising nitrogen; 
 a second insulating film over the first insulating film, the second insulating film comprising oxygen; 
 a first semiconductor film over the second insulating film; 
 a third insulating film over the first semiconductor film, the third insulating film comprising oxygen; 
 a first conductive film over the first semiconductor film with the third insulating interposed between the first conductive film and the first semiconductor film; 
 a fourth insulating film over the first conductive film, the fourth insulating film comprising nitrogen; 
 a second conductive film over the first conductive film with the fourth insulating film interposed between the first conductive film and the second conductive film; 
 a fifth insulating film over the fourth insulating film, the fifth insulating film being an inorganic insulating film; 
 a third conductive film over the fifth insulating film; 
 a planarization layer over the third conductive film; 
 a pixel electrode over the planarization layer; 
 an organic resin film over the pixel electrode; 
 a light-emitting member over the pixel electrode and the organic resin film; and 
 an opposing electrode over the light-emitting member, 
 wherein the fifth insulating film comprises a first opening, 
 wherein the planarization layer comprises a second opening, 
 wherein the organic resin film comprises a third opening, 
 wherein an edge portion of the second opening is rounded, 
 wherein an edge portion of the third opening is rounded, 
 wherein part of the third conductive film and part of the planarization layer are located in the first opening, 
 wherein part of the pixel electrode and part of the organic resin film are located in the second opening, and 
 wherein part of the light-emitting member and part of the opposing electrode are located in the third opening. 
 
     
     
       2. The display device according to  claim 1 , wherein the first insulating film comprises oxygen. 
     
     
       3. The display device according to  claim 1 , wherein the second insulating film comprises nitrogen. 
     
     
       4. The display device according to  claim 1 , wherein the first semiconductor film is an active layer of an n-channel type transistor. 
     
     
       5. The display device according to  claim 1 , wherein the third insulating film comprises nitrogen. 
     
     
       6. The display device according to  claim 1 , wherein the first conductive film is a tantalum nitride film or a tungsten film. 
     
     
       7. The display device according to  claim 1 , wherein the second conductive film is located over the fifth insulating film. 
     
     
       8. The display device according to  claim 1 , wherein the fifth insulating film is a planarized insulating film. 
     
     
       9. The display device according to  claim 1 , wherein the third conductive film comprises aluminum or copper. 
     
     
       10. The display device according to  claim 1 , wherein the planarization layer is an inorganic insulating film. 
     
     
       11. The display device according to  claim 1 , comprising a second semiconductor film over the second insulating film,
 wherein the third conductive film is in contact with the second semiconductor film. 
 
     
     
       12. The display device according to  claim 1 , wherein a capacitor is formed by the first semiconductor film, the third insulating film, and the first conductive film. 
     
     
       13. A display device comprising:
 a first insulating film comprising nitrogen; 
 a second insulating film over the first insulating film, the second insulating film comprising oxygen; 
 a first semiconductor film over the second insulating film; 
 a third insulating film over the first semiconductor film, the third insulating film comprising oxygen; 
 a first conductive film over the first semiconductor film with the third insulating interposed between the first conductive film and the first semiconductor film; 
 a fourth insulating film over the first conductive film, the fourth insulating film comprising nitrogen; 
 a second conductive film over the first conductive film with the fourth insulating film interposed between the first conductive film and the second conductive film; 
 a fifth insulating film over the fourth insulating film, the fifth insulating film being an inorganic insulating film; 
 a third conductive film over the fifth insulating film; 
 a planarization layer over the third conductive film; 
 a pixel electrode over the planarization layer; 
 an organic resin film over the pixel electrode; 
 a light-emitting member over the pixel electrode and the organic resin film; and 
 an opposing electrode over the light-emitting member, 
 wherein the fifth insulating film comprises a first opening, 
 wherein the planarization layer comprises a second opening, 
 wherein the organic resin film comprises a third opening, 
 wherein an edge portion of the second opening is rounded, 
 wherein an edge portion of the third opening is rounded, 
 wherein part of the third conductive film and part of the planarization layer are located in the first opening, 
 wherein part of the pixel electrode and part of the organic resin film are located in the second opening, 
 wherein part of the light-emitting member and part of the opposing electrode are located in the third opening, and 
 wherein a first capacitor is formed by the first conductive film, the fourth insulating film, and the second conductive film. 
 
     
     
       14. The display device according to  claim 13 , wherein the first insulating film comprises oxygen. 
     
     
       15. The display device according to  claim 13 , wherein the second insulating film comprises nitrogen. 
     
     
       16. The display device according to  claim 13 , wherein the first semiconductor film is an active layer of an n-channel type transistor. 
     
     
       17. The display device according to  claim 13 , wherein the third insulating film comprises nitrogen. 
     
     
       18. The display device according to  claim 13 , wherein the first conductive film is a tantalum nitride film or a tungsten film. 
     
     
       19. The display device according to  claim 13 , wherein the second conductive film is located over the fifth insulating film. 
     
     
       20. The display device according to  claim 13 , wherein the fifth insulating film is a planarized insulating film. 
     
     
       21. The display device according to  claim 13 , wherein the third conductive film comprises aluminum or copper. 
     
     
       22. The display device according to  claim 13 , wherein the planarization layer is an inorganic insulating film. 
     
     
       23. The display device according to  claim 13 , comprising a second semiconductor film over the second insulating film,
 wherein the third conductive film is in contact with the second semiconductor film. 
 
     
     
       24. The display device according to  claim 13 , wherein a second capacitor is formed by the first semiconductor film, the third insulating film, and the first conductive film. 
     
     
       25. A display device comprising:
 a first insulating film comprising nitrogen; 
 a second insulating film over the first insulating film, the second insulating film comprising oxygen; 
 a first semiconductor film over the second insulating film; 
 a third insulating film over the first semiconductor film, the third insulating film comprising oxygen; 
 a first conductive film over the first semiconductor film with the third insulating interposed between the first conductive film and the first semiconductor film; 
 a fourth insulating film over the first conductive film, the fourth insulating film comprising nitrogen; 
 a second conductive film over the first conductive film with the fourth insulating film interposed between the first conductive film and the second conductive film; 
 a fifth insulating film over the fourth insulating film, the fifth insulating film being an inorganic insulating film; 
 a third conductive film over the fifth insulating film; 
 a planarization layer over the third conductive film; 
 a pixel electrode over the planarization layer; 
 an organic resin film over the pixel electrode; 
 a light-emitting member over the pixel electrode and the organic resin film; and 
 an opposing electrode over the light-emitting member, 
 wherein the fifth insulating film comprises a first opening, 
 wherein the planarization layer comprises a second opening, 
 wherein the organic resin film comprises a third opening, 
 wherein an edge portion of the second opening is rounded, 
 wherein an edge portion of the third opening is rounded, 
 wherein part of the third conductive film and part of the planarization layer are located in the first opening, 
 wherein part of the pixel electrode and part of the organic resin film are located in the second opening, 
 wherein part of the light-emitting member and part of the opposing electrode are located in the third opening, and 
 wherein a bottom of the first opening and a bottom of the second opening are not overlapped with each other. 
 
     
     
       26. The display device according to  claim 25 , wherein the first insulating film comprises oxygen. 
     
     
       27. The display device according to  claim 25 , wherein the second insulating film comprises nitrogen. 
     
     
       28. The display device according to  claim 25 , wherein the first semiconductor film is an active layer of an n-channel type transistor. 
     
     
       29. The display device according to  claim 25 , wherein the third insulating film comprises nitrogen. 
     
     
       30. The display device according to  claim 25 , wherein the first conductive film is a tantalum nitride film or a tungsten film. 
     
     
       31. The display device according to  claim 25 , wherein the second conductive film is located over the fifth insulating film. 
     
     
       32. The display device according to  claim 25 , wherein the fifth insulating film is a planarized insulating film. 
     
     
       33. The display device according to  claim 25 , wherein the third conductive film comprises aluminum or copper. 
     
     
       34. The display device according to  claim 25 , wherein the planarization layer is an inorganic insulating film. 
     
     
       35. The display device according to  claim 25 , comprising a second semiconductor film over the second insulating film,
 wherein the third conductive film is in contact with the second semiconductor film. 
 
     
     
       36. The display device according to  claim 25 , wherein a capacitor is formed by the first semiconductor film, the third insulating film, and the first conductive film.