Biological sensor measuring electrochemical and/or electrical and diamond electrode and electronic integrated circuit

Abstract

A biological sensor for electrochemical and/or electrical measurement, including at least: a measurement electrode, able to make electrochemical and/or electrical measurements, and including a part of a doped diamond layer of a substrate comprising a stack including a dielectric layer placed between the doped diamond layer and a semiconductor material layer; an electronic circuit for amplifying and/or processing at least one electrical signal intended to be issued by the measurement electrode, electrically connected to the measurement electrode and made in a portion of the semiconductor material layer.

The invention claimed is: 
     
       1. A biological sensor for at least one of electrochemical and electrical measurements, comprising:
 a measurement electrode, able to make the at least one of electrochemical and electrical measurements, and including at least a part of a doped diamond layer of a substrate comprising a stack including at least one dielectric layer placed between the doped diamond layer and a semiconductor material layer; 
 trenches that delimit the measurement electrode from the remainder of the doped diamond layer, the trenches being filled with at least one dielectric material and crossing at least the doped diamond layer; and 
 an electronic circuit for at least one of amplifying and processing at least one electrical signal intended to be issued by the measurement electrode, the electronic circuit being different from the measurement electrode and electrically connected to the measurement electrode and made in a portion of the semiconductor material layer. 
 
     
     
       2. The biological sensor according to  claim 1 , in which the substrate is of the SOD type. 
     
     
       3. The biological sensor according to  claim 2 , in which the semiconductor material layer has a thickness less than or equal to 1 μm, the electronic circuit including one or more transistors of either PD-SOI or FD-SOI type. 
     
     
       4. The biological sensor according to  claim 1 , in which the electronic circuit is electrically connected to the measurement electrode by through vias and at least one electrical interconnection layer composed of at least one electrically conductive material formed in at least one passivation layer composed of at least one dielectric material placed against the semiconductor material layer, and in which at least one hole made through at least the passivation layer provides an access to the measurement electrode. 
     
     
       5. The biological sensor according to  claim 1 , in which the measurement electrode is placed in a recess made in at least the semiconductor layer. 
     
     
       6. The biological sensor according to  claim 1 , in which receptors biologically complementary to the molecules intended to be detected by the sensor are grafted onto the measurement electrode. 
     
     
       7. The biological sensor according to  claim 1 , further including a second electrode forming a reference electrode, or a second and third electrode, forming respectively a reference electrode and a counter-electrode, each electrode of the sensor including at least a portion of the diamond layer. 
     
     
       8. A biological sensor for at least one of electrochemical and electrical measurements, comprising:
 a measurement electrode, able to make the at least one of electrochemical and electrical measurements, and including at least a part of a doped diamond layer of a substrate comprising a stack including at least one dielectric layer placed between the doped diamond layer and a semiconductor material layer; and 
 an electronic circuit for at least one of amplifying and processing at least one electrical signal intended to be issued by the measurement electrode, the electronic circuit being different from the measurement electrode, the electronic circuit being made in a portion of the semiconductor material layer, and the electronic circuit being electrically connected to the measurement electrode by through vias and at least one electrical interconnection layer composed of at least one electrically conductive material made into at least one passivation layer composed of at least one dielectric material, wherein
 the semiconductor material layer is placed between the diamond layer and the passivation layer, or 
 the at least one passivation layer is placed against the semiconductor material layer, at least one hole being made through the at least one passivation layer and providing an access to the measurement electrode from outside of the sensor. 
 
 
     
     
       9. The biological sensor according to  claim 8 , in which the passivation layer is placed between a massive layer forming as a mechanical support for the sensor and the semiconductor layer. 
     
     
       10. The biological sensor according to  claim 8 , in which the at least one hole is made through the semiconductor material layer and the dielectric layer. 
     
     
       11. A biological sensor for at least one of electrochemical and electrical measurements, comprising:
 a measurement electrode, able to make the at least one of electrochemical and electrical measurements, and including at least a part of a doped diamond layer of a substrate comprising a stack including at least one dielectric layer placed between the doped diamond layer and a semiconductor material layer; and 
 an electronic circuit for at least one of amplifying and processing at least one electrical signal intended to be issued by the measurement electrode, the electronic circuit being different from the measurement electrode, the electronic circuit being made in a portion of the semiconductor material layer, and the electronic circuit being electrically connected to the measurement electrode by through vias and at least one electrical interconnection layer composed of at least one electrically conductive material made into at least one passivation layer composed of at least one dielectric material, wherein
 the semiconductor material layer is placed between the diamond layer and the passivation layer, or 
 the at least one passivation layer is placed against the semiconductor material layer, at least one hole being made through the at least one passivation layer and providing an access to the measurement electrode from outside of the sensor, the at least one hole not being filled with a material.