Laser device of equal-energy pulse synchronous with motion

Abstract

A laser device of an equal-energy pulse synchronous with motion includes: a resonant cavity, outputting a plurality of pulses with stable pulse-width and energy; a beam switch modulator, selectively enabling one of the pulses to pass; a beam energy modulator, adjusting the energy of the pulse according to a power feedback signal; an optical power sensor, sensing the energy and the pulse-width of the pulse; a motion controller, providing processing motion information; an optical feedback controller, outputting the power feedback signal to the beam energy modulator according to the energy of the pulse and the processing motion information; a trigger controller, measuring a time difference between time when the pulse is triggered and time when the optical power sensor detects the pulse, and correcting a turn-on time point of the beam switch modulator. The processing quality is therefore stabilized, and the device is applicable to various laser industrial processes.

What is claimed is: 
     
       1. A laser device of an equal-energy pulse synchronous with motion, comprising:
 a resonant cavity, outputting a plurality of pulses with stable pulse-width and energy; 
 a beam switch modulator, selectively enabling one of the pulses output by the resonant cavity to pass; 
 a beam energy modulator, adjusting the energy of the pulse passing through the beam switch modulator according to a power feedback signal and outputting the pulse for processing; 
 an optical power sensor, sensing the energy and the pulse-width of the pulse output by the beam energy modulator; 
 an optical feedback controller, connected electrically between the optical power sensor and the beam energy modulator, and outputting the power feedback signal to the beam energy modulator according to a piece of processing motion information and the energy sensed by the optical power sensor, wherein the processing motion information comprises a relative motion parameter for the pulse and a processing member; 
 a trigger controller, connected electrically to the optical power sensor and the beam switch modulator, wherein the trigger controller triggers the beam switch modulator to turn on, measures a time difference between time of trigger and time when the optical power sensor detects the pulse, and corrects a turn-on time point of the beam switch modulator according to the time difference and the processing motion information; and 
 a motion controller, connected electrically to the optical feedback controller and the trigger controller, and transmitting the processing motion information to the optical feedback controller and the trigger controller. 
 
     
     
       2. The laser device according to  claim 1 , further comprising:
 a beam profiler, detecting an optical form of the pulse output by the resonant cavity to obtain at least one optical quality parameter; and 
 a beam quantity controller, adjusting the resonant cavity according to the at least one optical quality parameter, and controlling a temperature in the resonant cavity, so that heat balance is achieved in the resonant cavity. 
 
     
     
       3. The laser device according to  claim 1 , wherein the resonant cavity further comprises at least one non-linear crystal. 
     
     
       4. The laser device according to  claim 1 , wherein the resonant cavity further comprises an aperture grating, to make the pulse in a single mode. 
     
     
       5. The laser device according to  claim 1 , further comprising: a quality switch is an acoustic-optic modulator. 
     
     
       6. The laser device according to  claim 1 , wherein the beam switch modulator is selected from a group of an acoustic-optic modulator and an electro-optic modulator. 
     
     
       7. The laser device according to  claim 1 , wherein the beam energy modulator is an acoustic-optic modulator. 
     
     
       8. The laser device according to  claim 1 , further comprising:
 a polarizer, performing circular polarization on the pulse output by the beam energy modulator, and outputting the pulse to the optical power sensor. 
 
     
     
       9. The laser device according to  claim 1 , further comprising:
 a wave selector, located between the beam switch modulator and the beam energy modulator, selecting one of a parallel wave (P-wave) and a perpendicular wave (S-wave) of the pulse to pass through the wave selector.