Article loading/unloading method and article loading/unloading device, exposure method and exposure apparatus, and method of manufacturing device

Abstract

A loading/unloading method to perform quickly exchanging an article to be loaded on a placing table. The method comprises: positioning the placing table, where article to be unloaded is placed, to a second position that is different from a first position; unloading the article that exists on the placing table; moving the placing table from the second position to the first position while the vertically moving member is positioned at a position lower than a lower surface of a loading member holding a next article and higher than the placing surface of the placing table; allowing a loading member holding the next article to wait over the first position before the placing table is positioned at the first position; and loading the next article onto the place table positioned at the first position after the placing table is moved to the first position.

1. A method for loading/unloading an article to a placing table that is moved for positioning within a predetermined plane and has a vertically moving member that moves vertically while holding the article between a position over the placing table and a placing surface of the article provided on the placing table comprising;
 positioning said placing table, where the article to be unloaded is placed, to a second position that is different from a first position within said predetermined plane, 
 unloading the article that exists on the placing table that is positioned at said second position after positioning said placing table to said second position, 
 moving said placing table from said second position to said first position while said vertically moving member is positioned at a position lower than a lower surface of a loading member holding a next article waiting for loading over said first position and higher than the placing surface of the placing table, after unloading said article from said placing table, 
 allowing a loading member holding the next article to be loaded onto the placing table to wait over the first position before the placing table is positioned at the first position, and 
 loading the next article onto the placing table positioned at the first position after moving said placing table from said second position to said first position. 
 
     
     
       2. The method for loading/unloading an article as set forth in  claim 1 , wherein;
 when said placing table is moved from said second position to said first position, the movement of said placing table performed at a maximum acceleration which is available to drive said placing table. 
 
     
     
       3. An exposure method for forming a pattern by an irradiating exposure beam on an article held on a placing table that is moved for positioning within a predetermined plane and has a vertically moving member that moves vertically while holding the article between over the placing table and a placing surface of the article provided on the placing table comprising;
 positioning said placing table, where the article to be unloaded is placed, to a second position that is different from a first position within said predetermined plane, 
 unloading the article that exists on the placing table that is positioned at said second position after positioning said placing table to said second position, 
 moving said placing table from said second position to said first position while said vertically moving member is positioned at a position lower than a lower surface of a loading member holding a next article waiting for loading over the first position and higher than the placing surface of the placing table after unloading said article from said placing table, 
 allowing a loading member holding the next article to be loaded onto the placing table to wait over the first position before the placing table is positioned at the first position, 
 loading the next article onto the placing table positioned at the first position after moving said placing table from said second position to said first position, and 
 performing exposure treatment with positioning said placing table to an exposure position which is different from said first position and said second position, after loading said next article onto said placing table at said first position and before positioning said placing tale to said second position. 
 
     
     
       4. A method for making a device comprising at least one portion of a circuit pattern for the device on said article, by using the exposure method as set forth in  claim 3 . 
     
     
       5. A loading/unloading unit comprising;
 a placing table to place an article, that is movable between a first position and a second position which are different from each other in a predetermined plane, 
 a loading member which loads the article to said placing table positioned at said first position, 
 an unloading member which unloads the article placed on said placing table positioned at said second position from said placing table, and 
 a control device wherein:
 said placing table comprises a vertically moving member that holds the article and vertically moves between over the placing table and a placing surface of the article provided on the placing table, 
 said control device controls said placing table, said loading member and said unloading member so that, after unloading the article placed on said placing table positioned at said second position by said unloading member, said placing table is moved to said first position while said vertically moving member is positioned at a position lower than a lower surface of the loading member and higher than the placing surface, said loading member holding a next article to be loaded on said placing table is waited over said first position before said placing table is positioned at said first position, and after this, said next article is loaded from said loading member to said placing table positioned at said first position. 
 
 
     
     
       6. An exposure apparatus which forms a pattern on an article by an irradiating exposure beam to said article placed on said placing table, wherein said exposure apparatus comprises a loading/unloading unit as set forth in  claim 5 .