Impulse actuated MEMS devices

Abstract

An apparatus, useful in, for example, a miniature camera, includes an object, e.g., an optical element such as a shutter blade, an actuator operable to apply an impulse to the object such that the object moves from a first position to a second position, and at least one flexure coupled to the object and operable to confine movement of the object to movement along a predefined trajectory extending between the first and second positions.

1. An apparatus, comprising:
 an object; 
 an actuator operable to apply a single impulse directly to the object such that the object moves from a first position to a second position; and 
 at least one flexure coupled to the object and operable to confine movement of the object to movement along a predefined trajectory extending between the first and second positions. 
 
     
     
       2. The apparatus of  claim 1 , wherein the at least one flexure is coupled to a supporting structure by a solid resilient hinge. 
     
     
       3. The apparatus of  claim 2 , wherein at least two of the object, the at least one flexure and/or the supporting structure are made integrally with each other from a substrate by micromachining. 
     
     
       4. The apparatus of  claim 3 , wherein the substrate comprises silicon. 
     
     
       5. The apparatus of  claim 1 , wherein the object comprises an optical element. 
     
     
       6. The apparatus of  claim 5 , wherein the optical element comprises a shutter blade. 
     
     
       7. A camera, comprising:
 a housing having an aperture configured to admit light into the housing along an optical axis; 
 an optical element supported by at least one flexure to move between first and second positions and along a predefined trajectory intersecting the optical axis in response to a single impulse imparted directly to the optical element; and 
 an actuator selectably operable to impart the impulse to the optical element. 
 
     
     
       8. The camera of  claim 7 , wherein the predetermined trajectory is one or more of generally planar, generally arcuate, and/or generally rectilinear. 
     
     
       9. The camera of  claim 7 , wherein the first position coincides with the optical axis. 
     
     
       10. The camera of  claim 7 , wherein the second position coincides with the optical axis. 
     
     
       11. The camera of  claim 7 , wherein the optical element comprises a shutter blade. 
     
     
       12. The camera of  claim 7 , wherein the at least one flexure is operable to return the optical element from the second position to the first position. 
     
     
       13. A method, comprising:
 providing a substrate; and 
 forming an object supported by at least one flexure pivotally connected to a supporting structure by at least one solid resilient hinge in the substrate, 
 wherein the at least one flexure is configured to confine movement of the object to a substantially planar, arcuate trajectory in response to a single impulse imparted directly to the object by an actuator. 
 
     
     
       14. The method of  claim 13 , wherein the substrate comprises silicon. 
     
     
       15. The method of  claim 13 , wherein the forming comprises micro-machining. 
     
     
       16. The method of  claim 13 , wherein the forming comprises photolithography. 
     
     
       17. The method of  claim 13 , wherein the object, the at least one flexure and the supporting structure are formed integrally with each other. 
     
     
       18. The method of  claim 13 , wherein the object comprises an optical element. 
     
     
       19. The method of  claim 18 , wherein the optical element comprises a shutter blade. 
     
     
       20. The method of  claim 13 , wherein the at least one flexure is further configured to return the object to an initial position after the object has been displaced therefrom.