Method and apparatus for manufacturing plate-like structure

Abstract

A method for manufacturing a plate-like structure, the method including a step of transferring concave and convex patterns on a master to a surface of a transferred substrate by sandwiching the master provided with the concave and convex patterns and the transferred substrate, between a press surface of a hollow cylindrical upper and a press surface of a lower mold, and pressurizing central parts of the upper and lower molds to apply pressure to the master and the transferred substrate, wherein a compressive load imposed on inner peripheral portions of the upper and lower molds is blocked and distributed toward outer peripheries of the upper and lower molds.

1. An apparatus which manufactures a plate-like structure, comprising;
 a master comprising a hollow portion formed at a center thereof and a concave-and-convex-formed region formed concave and convex patterns to be transferred by pressing the master onto a transferred substrate; 
 a hollow cylindrical upper mold comprising a hollow portion formed at a center thereof and a groove formed apart from an edge surface of the upper mold in an inner circumferential surface of the hollow portion; 
 a hollow cylindrical lower mold comprising a hollow portion formed at a center thereof and a groove formed apart from an edge surface of the lower mold in an inner circumferential surface of the hollow portion; 
 a pair of press surfaces comprising respectively a main surface of the upper mold and a main surface of the lower mold which oppose each other, and sandwiching the master and the transferred substrate; 
 an upper plate which supports the upper mold; and 
 a lower plate comprising a pin to be inserted to the hollow portions formed in the master, the upper mold and the lower mold, which supports the lower mold.