Electromechanical actuators and manufacturing method thereof

Abstract

An electromechanical actuator comprises a bimorph element ( 10 ) of an electromechanical material. The bimorph element ( 10 ) is controllably bendable in a first direction ( 15 ) by application of three voltage potentials to electrodes ( 41, 42, 43 ) of the bimorph element ( 10 ). The electromechanical actuator further comprises three conductive film areas ( 55, 56, 57 ) provided at a first side ( 51 ) of the bimorph element ( 10 ), which first side ( 51 ) is parallel to the first direction ( 15 ). The three conductive film areas ( 55, 56, 57 ) are electrically decoupled from each other. Furthermore, each of the three conductive film areas ( 55, 56, 57 ) is connected to at least one respective one of the electrodes ( 41, 42, 43 ). A method for manufacturing such an electromechanical actuator is also disclosed.

1. Electromechanical actuator system, comprising:
 at least two electromechanical actuators; 
 said at least two electromechanical actuators being attached by a respective first end to a common base and positioned parallel to each other, one after the other in a first direction; 
 said at least two electromechanical actuators having a respective actuating portion at a respective second end, said second end being opposite to said first end; 
 each of said at least two electromechanical actuators comprising:
 a bimorph element of an electromechanical material controllably bendable in said first direction by application of three voltage potentials to a multitude of electrodes of said bimorph element; and 
 three conductive film areas, electrically decoupled from each other, provided at a first side of said bimorph element parallel to said first direction; 
 said multitude of electrodes being perpendicular to said first side; and 
 each of said three conductive film areas being connected to a respective multitude of said electrode. 
 
 
     
     
       2. Electromechanical actuator system according to  claim 1 , wherein a common base has a base side in level with said first side of said bimorph elements, said base side having cross-connections between conductive film areas of different bimorph elements. 
     
     
       3. Electromechanical actuator system according to  claim 1 , wherein one of said three voltage potentials is ground potential. 
     
     
       4. Electromechanical actuator system according to  claim 1 , wherein said three conductive film areas constitute respective terminations of said multitude of electrodes of said bimorph element intended to be excited by a same respective voltage potential. 
     
     
       5. Electromechanical actuator system according to  claim 1 , wherein a second side of said bimorph element, opposite to said first side, is free from terminations. 
     
     
       6. Electromechanical actuator system according to  claim 1 , wherein said three conductive film areas are screen printed on said bimorph element. 
     
     
       7. Electromechanical actuator system according to  claim 1 , wherein at least one of said three conductive film areas on said bimorph element are further provided with passive or active electric components.