Image detector

Abstract

An image detector which includes an active matrix substrate and a protection substrate bonded to the active matrix substrate by an insulating bonding member, in which the insulating bonding member is bonded to the active matrix substrate through an inorganic insulating film disposed in an area around the periphery of the semiconductor layer.

1. An image detector comprising:
 an active matrix substrate having a substrate on which multitudes of switching elements are disposed; 
 a semiconductor layer which generates charges according to an electromagnetic wave representing image information irradiated thereon and is stacked on the active matrix substrate such that the charges are read out by the active matrix substrate; 
 a protection substrate disposed opposite to the active matrix substrate; and 
 an insulating bonding member which bonds the protection substrate to the active matrix substrate, 
 wherein the insulating bonding member is bonded to the active matrix substrate through an inorganic insulating film disposed in an area around the periphery of the semiconductor layer, 
 an organic insulating film is provided on the active matrix substrate, and 
 the protection substrate is bonded to the organic insulating film such that the protection substrate contacts the organic insulating film. 
 
     
     
       2. The image detector as claimed in  claim 1 , wherein the active matrix substrate includes an organic insulating film having a plurality of openings at a bonding area with the insulating bonding member and the inorganic insulating film is disposed at the openings of the organic insulating film. 
     
     
       3. The image detector as claimed in  claim 2 , wherein the openings of the organic insulating film are formed such that a contact area of the insulating bonding member with the inorganic insulating film through the openings corresponds to 20 to 80% of a contact area of the insulating bonding member with the active matrix substrate. 
     
     
       4. The image detector as claimed in  claim 3 , wherein the inorganic insulating film is disposed within the openings between two portions of the organic insulating film such that the inorganic insulating film and the organic insulating film are disposed within a same plane. 
     
     
       5. An image detector as defined in  claim 1 , wherein the protection substrate is formed by glass. 
     
     
       6. An image detector as defined in  claim 1 , wherein the material of the protection substrate is the same as the material of the active matrix substrate. 
     
     
       7. An image detector as defined in  claim 6 , wherein the protection substrate has a same board thickness as a board thickness of the active matrix substrate. 
     
     
       8. An image detector as defined in  claim 1 , wherein the protection substrate is box shaped, and is provided to cover the upper and side surfaces of the semiconductor layer. 
     
     
       9. An image detector as defined in  claim 1 , wherein the protection substrate is bonded to the active matrix substrate at an area more toward the exterior thereof than the insulating bonding member. 
     
     
       10. An image detector as defined in  claim 1 , wherein the insulating bonding member is disposed in contact with an upper surface and side surfaces of the semiconductor layer. 
     
     
       11. An image detector as defined in  claim 10 , wherein in the insulating bonding member is a one-piece integral construction. 
     
     
       12. An image detector as defined in  claim 1 , further comprising an electrode disposed between the semiconductor layer and the insulating bonding member such that the electrode is disposed in contact with a portion of an upper surface of the semiconductor layer and disposed in contact with a portion of a lower surface of the insulating bonding member. 
     
     
       13. An image detector as defined in  claim 12 , wherein the insulating bonding member is disposed in contact with the upper surface and side surfaces of the semiconductor layer. 
     
     
       14. An image detector as defined in  claim 13 , wherein in the insulating bonding member is a one-piece integral construction.