Electromagnetic radiation detecting apparatus, radiation detecting apparatus, radiation detecting system and laser processing method

Abstract

As to an electromagnetic radiation detecting apparatus, a radiation detecting apparatus, a radiation detecting system and a laser processing method, a TFT is disposed on an insulating substrate. A conversion element converting electromagnetic radiation into an electric signal is disposed over the TFT. A member for marking the position of the switching element is disposed on the conversion element. The position of a switching element having a defect can be located by means of the member on the conversion element. By radiating laser light to be focused on the member, it becomes possible to perform repair accurately.

1. An electromagnetic radiation detecting apparatus comprising:
 an insulating substrate; 
 a switching element disposed over said insulating substrate; 
 a photoelectric conversion element disposed over said switching element; 
 an insulating layer disposed between said switching element and said photoelectric conversion element; and 
 a shaped member aligned with respect to said switching element to mark a position of a portion of said switching element, 
 wherein said shaped member is disposed over a part of said photoelectric conversion element, and said part includes an area aligned with said switching element. 
 
     
     
       2. An electromagnetic radiation detecting apparatus according to  claim 1 , wherein
 said switching element has a source electrode, a drain electrode and a gate electrode, and 
 said shaped member is aligned with respect to said switching element such that said portion marked by said shaped member corresponds to an electrode of said switching element. 
 
     
     
       3. An electromagnetic radiation detecting apparatus according to  claim 2 , wherein said shaped member is aligned along a direction perpendicular to a direction along which any one of said source electrode, said drain electrode and said gate electrode is elongated. 
     
     
       4. An electromagnetic radiation detecting apparatus according to  claim 1 , wherein said shaped member is an insulating member. 
     
     
       5. An electromagnetic radiation detecting apparatus according to  claim 1 , wherein said shaped member is a light transmitting member. 
     
     
       6. An electromagnetic radiation detecting apparatus according to  claim 5 , wherein the light transmitting member is an electroconductive member. 
     
     
       7. An electromagnetic radiation detecting apparatus according to  claim 1 , wherein said shaped member includes a metal material. 
     
     
       8. An electromagnetic radiation detecting apparatus according to  claim 1 , wherein said shaped member includes an insulating organic film. 
     
     
       9. An electromagnetic radiation detecting apparatus according to  claim 1 , wherein said switching element is a TFT. 
     
     
       10. An electromagnetic radiation detecting apparatus according to  claim 1 , wherein said shaped member is used to discontinue an electrical connection between said switching element and a wiring connected to said switching element. 
     
     
       11. A radiation detecting apparatus comprising:
 an insulating substrate; 
 a switching element formed over said insulating substrate; 
 a photoelectric conversion element disposed over said switching element; 
 an insulating layer disposed between said switching element and said photoelectric conversion element; 
 a wavelength converter disposed over said photoelectric conversion element, said wavelength converter configured to convert a radiation into light; and 
 a shaped member disposed between said photoelectric conversion element and said wavelength converter, said shaped member aligned with respect to said switching element to mark a position of a portion corresponding to an electrode of said switching element, 
 wherein said shaped member is disposed over a part of said photoelectric conversion element, and said part includes an area aligned with said switching element. 
 
     
     
       12. A radiation detecting apparatus according to  claim 11 , wherein said photoelectric conversion element is an MIS type photoelectric conversion element. 
     
     
       13. A radiation detecting apparatus according to  claim 11 , wherein said photoelectric conversion element is a PIN type photoelectric conversion element. 
     
     
       14. A radiation detecting apparatus according to  claim 11 , wherein said wavelength converter is made of a material including one of Gd 2 O 2 S, Gd 2 O 3  and CsI as a principal component. 
     
     
       15. A radiation detecting apparatus according to  claim 11 , wherein said radiation detecting apparatus is incorporated in a radiation image pick-up system that includes:
 signal processing means for processing a signal from said radiation detecting apparatus; 
 recording means for recording a signal from said signal processing means; 
 display means for displaying said signal from said signal processing means; 
 transmitting processing means for transmitting a signal from said signal processing means; and 
 a radiation source for generating said radiation. 
 
     
     
       16. A radiation detecting apparatus according to  claim 11 , wherein said shaped member is used to discontinue an electrical connection between said switching element and a wiring connected to said switching element. 
     
     
       17. A laser processing method of an electromagnetic radiation detecting apparatus that includes an insulating substrate, a TFT disposed over said insulating substrate, and a conversion element for converting an electromagnetic radiation into an electric signal, wherein said conversion element is disposed over said TFT, and wherein an insulating layer is disposed between said switching element and said conversion element, said method comprising steps of:
 aligning a shaped member with respect to a TFT to mark a position of a portion corresponding to an electrode of the TFT, said shaped member being disposed over a part of said conversion element, said part including an area aligned with said TFT; 
 locating said shaped member in order to mark a position of a defect of said TFT; and 
 irradiating said shaped member with laser light to discontinue an electrical connection between said TFT and a wiring connected to said TFT. 
 
     
     
       18. An electromagnetic radiation detecting apparatus comprising:
 an insulating substrate; and 
 a pixel that includes:
 a switching element disposed over said insulating substrate, 
 a photoelectric conversion element disposed over said switching element, wherein said photoelectric conversion element includes a lower electrode electrically connected to said switching element, a semiconductor layer, and an upper electrode, 
 an insulating layer disposed between said switching element and said photoelectric conversion element, and 
 a shaped member aligned with respect to said switching element to mark a position of a portion corresponding to an electrode of said switching element, said shaped member being disposed in an area that includes a part of an area on said upper electrode of said photoelectric conversion element, and that includes at least a part of an area aligned with said switching element.