Linear stage including an integrated actuator and associated methods

Abstract

According to one example a linear translation stage is provided. The linear stage includes a first portion (e.g., a base portion) and a second portion (e.g., a stage portion) configured for relative translation with respect to each other. One of the first portion or the second portion has a coil associated therewith and the other of the first portion or the second portion has a magnetic source associated therewith. The magnetic source may include one or more magnets to produce a magnetic field that generally encompasses the coil such that current through the coil causes a force on the coil, thereby causing translation of the first portion relative to the second portion.

1. An apparatus for moving a stage, the apparatus comprising:
 a first portion; 
 a second portion, the second portion slidably engaged with the first portion, wherein one of the first portion and the second portion includes a stage; 
 a coil associated with the first portion; 
 at least one magnetic source associated with the second portion and forming a closed-loop magnetic circuit, the at least one magnetic source for providing a magnetic field in the vicinity of the coil, whereby varying the current through the coil causes translation of the first portion relative to the second portion; and 
 a center core spatially fixed with respect to the second portion, wherein the coil is disposed around the center core, and the center core is disposed between two endplates fixed to the second portion. 
 
   
   
     2. The apparatus of  claim 1 , wherein the coil and the at least one magnetic source form a voice coil actuator. 
   
   
     3. The apparatus of  claim 1 , wherein the at least one magnetic source comprises at least two permanent magnets. 
   
   
     4. The apparatus of  claim 1 , wherein the center core includes a ferromagnetic material. 
   
   
     5. The apparatus of  claim 1 , wherein the magnetic circuit is formed at least partially through the center core and end plates. 
   
   
     6. The apparatus of  claim 1 , wherein the coil is in a fixed spatial relationship with the first portion. 
   
   
     7. The apparatus of  claim 1 , further including a sensor positioned to sense relative movement of the first portion to the second portion. 
   
   
     8. An optical system including a translation stage as recited in  claim 1 .