Semiconductor memory device and manufacturing method thereof

Abstract

A semiconductor memory device includes a capacitor which comprises a ferroelectric layer with the perovskite crystal structure which, being expressed by the general formula ABO 3 , contains lead (Pb) as the element A occupying lattice A and zirconium (Zr) and titanium (Ti) as the element B occupying lattice B, and a lower electrode and an upper electrode which are disposed to sandwich the ferroelectric layer. The ferroelectric layer has, both on the side of the lower electrode and on the side of the upper electrode, a region each, in which a ratio of Zr to Ti (a Zr/Ti ratio) is equal to or greater than a Zr/Ti ratio of the central section of the ferroelectric layer in the direction of thickness, and the Zr/Ti ratio of at least one of the regions on the side of the lower electrode and on the side of the upper electrode is greater than the Zr/Ti ratio of the central section.

1. A semiconductor memory device having a capacitor which comprises a ferroelectric layer with the perovskite crystal structure which, being expressed by the general formula ABO 3 , contains lead (Pb) as the element A occupying lattice A and zirconium (Zr) and titanium (Ti) as the element B occupying lattice B, and a lower electrode and an upper electrode which are disposed to sandwich said ferroelectric layer; wherein
 said ferroelectric layer has, both on the side of said lower electrode and on the side of said upper electrode, a region each, in which a ratio of Zr to Ti (a Zr/Ti ratio) is equal to or greater than a Zr/Ti ratio of the central section of said ferroelectric layer in the direction of thickness, and the Zr/Ti ratio of at least one of the regions on the side of said lower electrode and on the side of said upper electrode is from 1.05 to 2.0 times the Zr/Ti ratio of said central section. 
 
     
     
       2. A semiconductor memory device according to  claim 1 , wherein said ferroelectric layer has a first ferroelectric layer which is formed on said lower electrode and a second ferroelectric layer which is formed on said first ferroelectric layer and adjacent to said upper electrode, and a Zr/Ti ratio of said first ferroelectric layer is greater than a Zr/Ti ratio of said second ferroelectric layer. 
     
     
       3. A semiconductor memory device according to  claim 1 , wherein said ferroelectric layer has a first ferroelectric layer which is formed on said lower electrode and a second ferroelectric layer which is formed on said first ferroelectric layer and adjacent to said upper electrode, and a Zr/Ti ratio of said second ferroelectric layer is greater than a Zr/Ti ratio of said first ferroelectric layer. 
     
     
       4. A semiconductor memory device according to  claim 2 , wherein the Zr/Ti ratios of said first and second ferroelectric layers are each constant along the direction of thickness. 
     
     
       5. A semiconductor memory device according to  claim 3 , wherein the Zr/Ti ratios of said first and second ferroelectric layers are each constant along the direction of thickness. 
     
     
       6. A semiconductor memory device according to  claim 1 , wherein said ferroelectric layer has a first ferroelectric layer which is formed on said lower electrode, a second ferroelectric layer which is formed on said first ferroelectric layer and a third ferroelectric layer which is formed on said second ferroelectric layer and adjacent to said upper electrode, and Zr/Ti ratios of said first and third ferroelectric layers are greater than a Zr/Ti ratio of said second ferroelectric layer. 
     
     
       7. A semiconductor memory device according to  claim 6 , wherein the Zr/Ti ratios of said first, second and third ferroelectric layers are each constant along the direction of thickness. 
     
     
       8. A semiconductor memory device according to  claim 1 , which further comprises, on said lower electrode, a growth-nucleus layer with the perovskite crystal structure, wherein said ferroelectric layer is formed to overlie said growth-nucleus layer. 
     
     
       9. A semiconductor memory device according to  claim 8 , wherein said growth-nucleus layer is formed in the shape of a plurality of islands. 
     
     
       10. A semiconductor memory device according to  claim 8 , wherein said growth-nucleus layer is made of a material with the perovskite crystal structure containing no Zr. 
     
     
       11. A semiconductor memory device according to  claim 8 , wherein said growth-nucleus layer is made of lead titanate (PbTiO 3 ). 
     
     
       12. A semiconductor memory device according to  claim 1 , wherein said ferroelectric layer has the perovskite crystal structure expressed by the general formula Pb(Zr y Ti 1-y )O 3 (0<y<1). 
     
     
       13. A semiconductor memory device according to  claim 1 , wherein the Zr/Ti ratio of at least one of the regions on the side of said lower electrode and on the side of said upper electrode is from 1.1 to 1.8 times the Zr/Ti ratio of said central section.