Method of making a magnetic write head and in-process head structures

Abstract

A batch fabrication technique is described that increases the manufacturing efficiency of servo write heads and also improves servo pattern definition for fine features, while reducing tape and head wear. Multiple heads are fabricated as a batch from one or more ferrite wafers. A nominally flat, large wafer surface and a contour suitable for uniform photoresist application an planar photolithography permit fine servo pattern definition with low linewidth variation. Non-magnetic material is photolithographically defined to produce gaps above a spacer. The non-magnetic material may be photoresist, semiconductor materials, glass, metal or the like. The material may even be removed later to leave air gaps. Additionally, a lower ferrite wafer may be mated to the upper ferrite wafer to complete a magnetic circuit around the gaps. A rounded leading edge on the head creates an air bearing to reduce ware of the tape and of the head. The leading edge is rounded to form an air bearing between the head surface and the tape. Rounding of the leading edge can be accomplished by a variety of methods including blending, grinding, and faceting.

What is claimed is:  
     
       1. A method for forming a magnetic write head, comprising: 
       forming a first wafer having a first planar surface on a repeating pattern of ferrite portions separated by a non-magnetic spacer and a second surface opposite the first surface;  
       forming a groove in the first wafer along the second surface of the first wafer, the groove positioned along each non-magnetic spacer such that the non-magnetic spacers are exposed from the second surface of the wafer;  
       forming a second ferrite wafer having a first surface and an opposing second surface;  
       forming a plurality of grooves in the second wafer along the first surface of the second wafer;  
       positioning the first and second wafers such that the second surface of the first wafer faces the first surface of the second wafer and the grooves in the first wafer are aligned with the grooves in the second wafer;  
       bonding the first wafer to the second wafer;  
       forming a layer of photoresist on the first surface of the first wafer;  
       removing the photoresist to expose the first surface of the first wafer except at desired locations of recording gaps over the non-magnetic spacers; and  
       forming a layer of magnetic material on the exposed first surface of the first wafer to a depth not greater than a depth of the remaining photoresist.  
     
     
       2. The method of  claim 1 , further comprising cutting the bonded wafers along the ferrite portions to form multiple composite strips each having first and second ferrite portions separated by each non-magnetic spacer. 
     
     
       3. The method of  claim 2 , wherein said cutting further comprises cutting the bonded wafers along the ferrite portions before forming the further the layer of photoresist on the first surface of the first wafer.