Actuator element

Abstract

An actuator element forming a portion of a micro electro-mechanical device and which comprises a movable arm that is connected at one end to a substrate and which is formed at least in part from a titanum-aluminium nitride composition. The actuator element forms a component of a thermal actuator which, in a particular embodiment of the invention, is actuated to drive a paddle within a printhead ejector and so displace ink from the ejector.

What is claimed is:  
     
       1. An actuator element forming a portion of a micro electro-mechanical device and which comprises a movable arm that is connected at one end to a substrate and which is formed at least in part from a titanium-aluminium nitride composition. 
     
     
       2. The actuator element as claimed in  claim 1  wherein the composition contains aluminium in an amount not greater than 55% of the total titanium-aluminium composition. 
     
     
       3. The actuator element as claimed in  claim 1  wherein the aluminium is present in the composition in an amount equal to about 20% of the total titanium-aluminium composition. 
     
     
       4. The actuator element as claimed in  claim 1  when formed by reactively sputtering material from a titanium-aluminium alloy in the presence of nitrogen gas.