US6556031B2ExpiredUtilityA1

Verticle probe card for attachment within a central corridor of a magnetic field generator

Assignee: VEECO INSTR INCPriority: Feb 23, 1999Filed: Mar 19, 2002Granted: Apr 29, 2003
Est. expiryFeb 23, 2019(expired)· nominal 20-yr term from priority
G01R 31/2887
34
PatentIndex Score
0
Cited by
1
References
2
Claims

Abstract

A vertical probe card assembly containing a plurality of vertical probe cards is mounted within a central corridor or opening within a magnetic field generator. Each of the vertical probe cards has a multiplicity of probe needles extending downwardly therefrom for electrically contacting test pads of a device under test that is positioned below the magnetic field generator.

Claims

exact text as granted — not AI-modified
We claim:  
     
       1. A probe card comprising: 
       an elongated probe card substrate having opposed ends;  
       a multiplicity of probe needles coupled to one of said opposed ends, said probe needles extending substantially parallel to a horizontal surface of a device under test; and  
       wherein said probe card substrate is disposed so as to extend through a corridor in a magnetic field generator such that said probe card substrate is substantially orthogonal to the horizontal surface of the device under test.  
     
     
       2. The probe card of  claim 1 , wherein said probe needles include first and second opposed ends, said first ends coupled to said probe card substrate and at least a portion of said seconds ends extending substantially orthogonally to the horizontal surface of the device under test.

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