Die-bonding machine

Abstract

In a die-bonding machine for picking up a number of semiconductor pellets arranged in the form of a pellet array, one by one, to place a picked-up semiconductor pellet on a predetermined position, when an estimated X-direction coordinate position of the semiconductor pellet to be picked up in relation to the pellet supporting and displacing mechanism is assumed as being "x" by considering a center point of the pellet supporting and displacing mechanism as the origin of the coordinates in the X direction, the pellet supporting and displacing mechanism and the pellet picking-up and carrying mechanism are displaced so that an X-direction coordinate position PX of the pick-up position takes a position expressed by the following equation (1) and an X-direction coordinate position CX of the center point of the pellet supporting and displacing mechanism takes a position expressed by the following equation (2): PX=Ax (1) CX=-(1-A)x (2) where 0<A<1.

What is claimed is: 
     
       1. A die-bonding machine for picking up a number of semiconductor pellets arranged in the form of a pellet array, one by one, to place a picked-up semiconductor pellet on a predetermined position, the die-bonding machine comprising: a pellet supporting and displacing mechanism for supporting said number of semiconductor pellets arranged in the form of the pellet array, and for displacing said number of semiconductor pellets arranged in the form of the pellet array, in an X direction and in a Y direction; and   a pellet picking-up and carrying mechanism having a pellet sucking means which can be displaced in the X direction, in the Y direction and in a Z direction, for picking up one semiconductor pellet positioned on a pick-up position, from said number of semiconductor pellets supported by said pellet supporting and displacing mechanism, and for placing the picked-up semiconductor pellet on said predetermined position, said pick-up position being movable only in the X direction,   wherein a center point of said pellet supporting and displacing mechanism is the origin of the coordinates in the X direction,   wherein an X-direction coordinate position of the semiconductor pellet to be picked up in relation to said pellet supporting and displacing mechanism is "x", and   wherein a center position of an X-direction moving range of said pellet supporting and displacing mechanism is the origin of the coordinates,   wherein said pellet supporting and displacing mechanism and said pellet picking-up and carrying mechanism are displaced so that an X-direction coordinate position PX of said pick-up position takes a position expressed by a first equation, said first equation being "PX=Ax" and an X-direction coordinate position CX of said center point of said pellet supporting and displacing mechanism takes a position expressed by a second equation, said second equation being "CX=-(1-A)x, and   wherein said A is a positive number less than 1.   
     
     
       2. The die-bonding machine claimed in claim 1, further including a position ascertaining means located above said pick-up position. 
     
     
       3. The die-bonding machine claimed in claim 1, further including a push-up pin located under said pick-up position. 
     
     
       4. The die-bonding machine claimed in claim 1, wherein "A"=1/2. 
     
     
       5. A die-bonding machine for picking up a number of semiconductor pellets arranged in the form of a pellet array, one by one, to place a picked-up semiconductor pellet on a predetermined position, the die-bonding machine comprising: a pellet supporting and displacing mechanism for supporting said number of semiconductor pellets arranged in the form of the pellet array, and for displacing said number of semiconductor pellets arranged in the form of the pellet array, in an X direction and in a Y direction; and   a pellet picking-up and carrying mechanism having a pellet sucking means which can be displaced in the X direction, in the Y direction and in a Z direction, for picking up one semiconductor pellet positioned on a pick-up position, from said number of semiconductor pellets supported by said pellet supporting and displacing mechanism, and for placing the picked-up semiconductor pellet on said predetermined position, said pick-up position being movable in the X direction and in the Y direction,   wherein a center point of said pellet supporting and displacing mechanism is the origin of the coordinates in the X direction and in the Y direction,   wherein an X-direction coordinate position and a Y-direction coordinate position of the semiconductor pellet to be picked up in relation to said pellet supporting and displacing mechanism are "x" and "y", respectively, and   wherein a center position of an X-direction and Y-direction moving range of said pellet supporting and displacing mechanism is the origin of the coordinates,   wherein said pellet supporting and displacing mechanism and said pellet picking-up and carrying mechanism are displaced so that an X-direction coordinate position PX and a Y-direction coordinate position PY of said pick-up position take a position expressed by a first equation and a second equation, respectively, said first equation being "PX=Ax" and said second equation being "PY=By", and an X-direction coordinate position CX and a Y-direction coordinate position CY of said center point of said pellet supporting and displacing mechanism take a position expressed by a third equation and a fourth equation, respectively, said third equation being "CX=-(1-A)x" and said fourth equation being "CY=-(1-B)y", A and B being positive numbers less than 1.   
     
     
       6. The die-bonding machine claimed in claim 5, further including a position ascertaining means located above said pick-up position. 
     
     
       7. The die-bonding machine claimed in claim 5, further including a push-up pin located under said pick-up position. 
     
     
       8. The die-bonding machine claimed in claim 5, wherein "A"="B"=1/2. 
     
     
       9. The die-bonding machine claimed in claim 1, wherein said predetermined position on which the semiconductor pellet is placed comprises a die bonding position. 
     
     
       10. The die-bonding machine claimed in claim 5, wherein said predetermined position on which the semiconductor pellet is placed comprises a die bonding position. 
     
     
       11. The die-bonding machine claimed in claim 1, wherein said predetermined position on which the semiconductor pellet is placed comprises a relay position for precision positioning. 
     
     
       12. The die-bonding machine claimed in claim 5, wherein said predetermined position on which the semiconductor pellet is placed comprises a relay position for precision positioning. 
     
     
       13. The die-bonding machine claimed in claim 1, wherein said pellet supporting and displacing mechanism comprises a rotating mechanism for adjusting an angular position of the semiconductor pellets. 
     
     
       14. The die-bonding machine claimed in claim 5, wherein said pellet supporting and displacing mechanism comprises a rotating mechanism for adjusting the direction of the semiconductor pellets. 
     
     
       15. The die-bonding machine claimed in claim 1, further comprising a discriminating means for detecting defective pellets. 
     
     
       16. The die-bonding machine claimed in claim 5, further comprising a discriminating means for detecting defective pellets. 
     
     
       17. A die-bonding machine for selectively placing one of a plurality of semiconductor pellets on a predetermined position, comprising: a pellet supporting and displacing mechanism for supporting said number of semiconductor pellets arranged in the form of a pellet array, and for displacing said number of semiconductor pellets arranged in the form of the pellet array, in an X direction and in a Y direction; and   a pellet picking-up and carrying mechanism having a suctioning device, for picking up one pellet on a pick-up position, from said plurality of semiconductor pellets supported by said pellet supporting and displacing mechanism, and for placing said one semiconductor pellet on said predetermined position   wherein a center point of said pellet supporting and displacing mechanism is the origin of at least one of a coordinate in the X direction and one of a coordinate in the Y direction,   wherein at least one of an X-direction coordinate position and a Y-direction coordinate position of the semiconductor pellet to be picked up in relation to said pellet supporting and displacing mechanism is at least one of"x" and "y", and   wherein a center position of at least one of an X-direction and Y-direction moving range of said pellet supporting and displacing mechanism is the origin of the coordinates, and   wherein said pellet supporting and displacing mechanism and said pellet picking-up and carrying mechanism are displaced so that at least one of an X-direction coordinate position and a Y-direction coordinate position of said pick-up position take a position,   wherein said X-direction coordinate position PX of said pick-up position takes a position expressed by a first equation being "PX=Ax" and an X-direction coordinate position CX of said center point of said pellet supporting and displacing mechanism takes a position expressed by a second equation, said second equation being "CX=-(1-A)", where A is a positive number less than 1.   
     
     
       18. The die-bonding machine, as claimed in claim 17, wherein said suctioning device is displaceable in at least one of the X direction, in the Y direction, and in a Z direction, and wherein said pick-up position is movable in at least one of the X direction and in the Y direction.   
     
     
       19. The die bonding machine, as claimed in claim 17, wherein said pellet supporting and displacing mechanism and said pellet picking-up and carrying mechanism are displaced so that a Y-direction coordinate position of said pick-up position takes a position, wherein said Y-direction coordinate position PY of said pick-up position takes a position expressed by a third equation, said third equation being "PY=By" and an Y-direction coordinate position CY of said center point of said pellet supporting and displacing mechanism takes a position expressed by a fourth equation, said fourth equation being "CY=-(1-B)y", where B is a positive number less than 1.