Method for calibrating rotating tools

Abstract

A method for monitoring the calibration of and calibrating rotating tools ich are liable to deviate, wherein at least one known deviation is recorded at a first predetermined rotational speed. The method can be used with annular saws that divide workpieces into semiconductor wafers.

What is claimed is: 
     
       1. A method for monitoring the calibration of and calibrating rotating tools which are liable to deviate comprising recording at least one known deviation at a first predetermined rotational speed; said one deviation being a measurement value which is then compared with a predetermined deviation value in a computer.   
     
     
       2. The method for monitoring the calibration of and calibrating rotating tools which are liable to deviate as claimed in claim 1, comprising recording at least one other known deviation at a second predetermined rotational speed which differs from the first rotational speed; said other deviation being a measurement value which is then compared with a predetermined deviation value in a computer.   
     
     
       3. The method for monitoring the calibration of and calibrating rotating tools which are liable to deviate as claimed in claim 2, wherein the recording is used to calibrate a device of which the rotating tool forms a part. 
     
     
       4. In a method for monitoring the calibration of and calibrating displacement measurement sensors which measure without physical contact, the improvement which comprises,   utilizing the method of claim 2 for said monitoring and said calibrating.   
     
     
       5. The method for monitoring the calibration of and calibrating rotating tools which are liable to deviate as claimed in claim 1, wherein the recording is used to calibrate a device of which the rotating tool forms part. 
     
     
       6. In a method for monitoring the calibration of and calibrating displacement measurement sensors which measure without physical contact, the improvement which comprises   utilizing the method of claim 1, for said monitoring and said calibrating.