High precision mount

Abstract

A stable mount for mounting a narrow bandwidth beam generating source such as a laser or electron beam. The mount places two such devices in substantially vertical alignment with each other. One of the sources is completely adjustable with respect to the other. The device is especially suitable for the imaging field where it is desired to couple two laser heads each having one or a multiple of individual laser beams. The laser heads formerly subjected to mechanical vibration and temperature induced drift, can now be precisely located, adjusted and stabilized one to the next. This allows for increased job throughput without sacrificing the fidelity or macroscopic quality of the resulting image. The device is also suitable for use in photo microlithography where precise alignment is critical.

What is claimed is: 
     
       1. A high precision mount comprising: a mounting block for holding, in substantially mirrored relation about an axis through a centerline of said mounting block two laser heads in stable relation to a substrate; and   a means for adjusting within said mounting block said laser heads in each of an x, y, z, and θ direction.   
     
     
       2. A device according to claim 1, wherein said mounting block further comprises an upper cradling surface and a lower cradling surface each for receiving and supporting in intimate communication one of said laser heads respectively, and said mounting device further includes a thickness of material between each of said cradling surfaces thereby displacing each of said beam generating sources a minimum distance t from the other. 
     
     
       3. A device according to claim 2, wherein said cradling surfaces are aligned one to the other along a vertical plane through a centerline of each of said cradling surfaces. 
     
     
       4. A device according to claim 2, wherein said cradling surfaces are further angled toward each other with a forwardmost face of said mounting block measuring said minimum distance t and a rearmost face of said mounting block measuring some value greater than t. 
     
     
       5. A device according to claim 4, wherein said value oft is as small as practical and said some value greater than y is as small as practical limited by interference between said laser heads. 
     
     
       6. A device according to claim 2, wherein said mounting block is made from a material possessing a low coefficient of thermal expansion. 
     
     
       7. A device according to claim 2, wherein said means for adjusting said laser heads is capable of moving said beam generating source in the requisite direction in increments of no greater than about 1 micron. 
     
     
       8. A device according to claim 2, wherein said means for adjusting said laser heads comprise very fine threaded screws, wherein each of said very fine threaded screws is made to contact a portion of one of said laser heads at a contact point; whereby continuing to engage any one of said very fine threaded screw once said screw contacts said contact point causes said screw to displace said laser head a desired distance. 
     
     
       9. A device according to claim 8, wherein said adjustability in said y direction is dependent upon said adjustability in said x direction. 
     
     
       10. A device according to claim 9, wherein said very fine threaded screws have at least 80 threads per inch. 
     
     
       11. A device according to claim 3, for use in laser imaging wherein each of said laser heads is adjustable to the other in a smooth continuous movement. 
     
     
       12. A device according to claim 11, for use in laser imaging wherein each of said laser heads comprise a plurality of individual lasers spaced a fixed distance r h  apart; whereby combining the adjustability of each of said laser heads with a predetermined time delay in pulsing each of said individual lasers enables a series of dots to be indicated upon said substrate, each dot representing at least one laser pulse. 
     
     
       13. A device according to claim 12, wherein said predetermined time delay is controlled by a computer. 
     
     
       14. A device according to claim 13, wherein said mounting block is made from a material possessing a low coefficient of thermal expansion. 
     
     
       15. A device according to claim 14, wherein said mounting block is made of invar. 
     
     
       16. A device according to claim 13, wherein a combination of said dots is a graphic image. 
     
     
       17. A high precision mount for retaining a plurality of laser heads in stable and adjustable relation for the opto-mechanical processing of a substrate comprising: a plurality of separately contained laser heads each having at least one laser emitting diode therein wherein at least one of said laser heads can be positionally adjusted and stably maintained with respect to at least another of said laser heads in at least an x, z, and θ direction;   a substrate mounting surface for retaining a substrate which is to be subjected to an optical process,   a mounting block for holding in stable relation said plurality of laser heads directionally toward said substrate mounting surface, said mounting block further comprising means for positionally adjusting and stably maintaining said laser heads one with respect to another; and   a control means for controlling movement between said plurality of laser heads and said substrate mounting surface.   
     
     
       18. A device according to claim 17, wherein said mounting block further comprises a first cradling surface and a second cradling surface, wherein said second cradling surface is substantially identical to said first cradling surface and is mirrored about a center axis of said mounting block, and said cradling surface further support and retain a first and a second laser head respectively. 
     
     
       19. A device according to claim 18, wherein adjustability is accomplished by a plurality of adjustment means. 
     
     
       20. A device according to claim 19, wherein said adjustment means are fine threaded screws. 
     
     
       21. A device according to claim 20, wherein said mounting block is made from a material possessing a low coefficient of thermal expansion. 
     
     
       22. A device according to claim 21, wherein said mounting block is made of invar.