Soft magnetic alloy film and a magnetic head using such soft a magnetic alloy film

Abstract

There is provided a soft magnetic alloy having a composition expressed by formula Co x M z C w , wherein M represents one or more than one of the metal elements including Ti, Zr, Hf, Nb, Ta, Mo, V and W, and x, w and z represent the ratios in terms of atom % of the respective elements in the overall composition satisfying 55≦x≦96, 2≦x≦25, 0.1≦x≦20 and x+z+w=100 and metallurgically consisting of crystalline particles with an average diameter of less than 0.05 μm. The alloy partially contains carbide(s) of element(s) M in the crystal phase. A magnetic head comprising such a soft magnetic alloy film shows an excellent saturated flux density that can accommodate the requirement of high recording density and other requirements.

I claim: 
     
       1. A soft magnetic alloy film having a composition expressed by general formula Co x  M z  C w , wherein: M represents at least one metal element from the group consisting of Ti, Zr, Hf Nb, Ta, Mo, V and W; and   x, w and z represent ratios of the respective elements in terms of atom % and satisfy   55≦x≦96       2≦z≦25,       0.1≦w≦25 and       x+z+w=100;       said soft magnetic alloy film having crystalline particles with an average diameter of less than 0.05 μm; and   said alloy partially containing crystalline carbides of element M.   
     
     
       2. A soft magnetic alloy film having a composition expressed by general formula Co x  T y  M z  C w , wherein: T represents at least one metal element from the group consisting of Fe, Ni, and Mn,   M represents at least one metal element from the group consisting of Ti, Zr, Hf, Nb, Ta, Mo, V and W, and   x, y, z and w represent ratios of the respective elements in terms of atom % and satisfy   50≦x≦96       0.1≦y≦20,       2≦z≦25,       0.1≦w≦25,       x+y+z+w=100;       said soft magnetic alloy film having crystalline particles with an average diameter of less than 0.005 μm; and   said alloy partially containing crystalline carbides of element M.