US4211563AExpiredUtility
Aqueous photoresist of casein and N-methylol acrylamide
Est. expiryFeb 13, 1998(expired)· nominal 20-yr term from priority
Inventors:Abraham Goldman
G03F 7/032G03F 7/04
51
PatentIndex Score
9
Cited by
11
References
4
Claims
Abstract
The addition of N-methylol acrylamide as an accelerator to casein-based aqueous photoresist compositions reduces the baking temperature required to render the developed resist etch resistant.
Claims
exact text as granted — not AI-modifiedI claim:
1. A photoresist composition comprising an aqueous solution containing from about 4-12 percent by weight of the composition of casein, sodium borate in an amount of from about 8-20 percent by weight of the casein and so that the final pH is from about 6.7 to 7.3; from about 2-20 percent by weight of the casein of a dichromate salt and from about 5-30 percent by weight of the casein of N-methylol acrylamide.
2. A photoresist composition according to claim 1 further including a surfactant.
3. A photoresist composition according to claim 1 wherein the dichromate is ammonium dichromate or sodium dichromate.
4. In an aqueous photoresist composition comprising about 4-12 percent by weight of the composition of an acid precipitated casein, a sodium borate alkalizer in an amount from about 8-20 percent by weight of the casein, and from about 2-20 percent by weight of the casein of a dichromate sensitizer, the improvement which comprises adding from about 5-30 percent by weight of the casein of N-methylol acrylamide.Join the waitlist — get patent alerts
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