Processing device

Abstract

A processing device includes: three linear guides disposed at three vertices of a triangle in plan view as viewed from a direction parallel to a first direction; a processing unit supported by the linear guides to lift and lower in the first direction; a feed mechanism that lifts and lowers the processing unit in the first direction; and a holding mechanism that holds a processing object below the processing unit, in which the processing unit supports a grindstone to face the processing object and includes a spindle unit that rotates the grindstone around a rotation center, a centroid of the processing unit is located inside the triangle, and when the grindstone is rotated, the grindstone passes through a position not overlapping a centroid of the triangle and passes through a position deviated from the centroid of the triangle toward a location where a force is applied to the processing unit.

What is claimed is: 
     
         1 . A processing device comprising: 
 three linear guides disposed at positions corresponding to three vertices of a triangle in plan view as viewed from a direction parallel to a first direction;   a processing unit supported by the linear guides to lift and lower in the first direction;   a feed mechanism that lifts and lowers the processing unit in the first direction; and   a holding mechanism that holds a processing object below the processing unit, wherein   the processing unit supports a grindstone such that the grindstone faces the processing object held by the holding mechanism and includes a spindle unit that rotates the grindstone around a rotation center parallel to the first direction,   a centroid of the processing unit is located inside the triangle in plan view, and   when the grindstone is rotated around the rotation center, the grindstone passes through a position not overlapping a centroid of the triangle and passes through a position deviated from the centroid of the triangle toward a location where a force in a lifting and lowering direction is applied to the processing unit by the feed mechanism.   
     
     
         2 . The processing device according to  claim 1 , wherein 
       the processing unit supports the grindstone and one or more additional grindstones disposed at equal intervals in a circumferential direction along a circumference around the rotation center. 
     
     
         3 . The processing device according to  claim 2 , wherein 
       when the grindstone is rotated around the rotation center, the grindstone passes through the location where the force in the lifting and lowering direction is applied to the processing unit by the feed mechanism in plan view. 
     
     
         4 . The processing device according to  claim 1 , wherein 
       the processing unit includes a slider, and the linear guide supports the slider to be movable in a direction perpendicular to the first direction. 
     
     
         5 . The processing device according to  claim 4 , wherein 
       during processing of the processing object, the slider is moved in the direction perpendicular to the first direction until the processing object overlaps a range through which the grindstone passes, and the processing unit is lowered to a height at which the grindstone comes into contact with a surface of the processing object, so that processing of grinding or polishing is performed. 
     
     
         6 . The processing device according to  claim 1 , wherein 
       the centroid of the processing unit is located inside a small triangle that shares a centroid with the triangle in plan view, has each side parallel to each side of the triangle, and has an area that is 1/4 of the triangle. 
     
     
         7 . The processing device according to  claim 1 , further comprising: 
 a gravity compensation mechanism that applies a force to the processing unit in a direction parallel to the first direction, the force being opposite to gravity and passing through the centroid of the processing unit.   
     
     
         8 . The processing device according to  claim 7 , wherein 
       the gravity compensation mechanism includes a connecting part attached to the processing unit, and a force generating unit that applies a force in a direction opposite to gravity to the processing unit via the connecting part.