Substrate transfer apparatus

Abstract

The substrate transfer apparatus according to one or more embodiments may include an end effector that includes a hand that grips a substrate; and a plunger that comes into contact with the substrate and performs alignment of the substrate including: a contact portion that comes into contact with the substrate; a shaft that moves the contact portion to contact the substrate; and an isolation wall that isolates an internal region from an outside, the internal region comprising a driver that drives the shaft, wherein the isolation wall comprises a shaft hole through which the shaft extends into the internal region, and the shaft comprises a cover in which a first end is connected to the shaft and a second end is connected to the isolation wall.

1 . A substrate transfer apparatus comprising:
 an end effector comprising:
 a hand that grips a substrate; and 
 a plunger that comes into contact with the substrate and performs alignment of the substrate comprising:
 a contact portion that comes into contact with the substrate; 
 a shaft that moves the contact portion to contact the substrate; and 
 an isolation wall that isolates an internal region from an outside, the internal region comprising a driver that drives the shaft, wherein 
 
   the isolation wall comprises a shaft hole through which the shaft extends into the internal region, and   the shaft comprises a cover in which a first end is connected to the shaft and a second end is connected to the isolation wall.   
     
     
         2 . The substrate transfer apparatus according to  claim 1 , wherein
 the shaft comprises a convex portion protruding from the shaft.   
     
     
         3 . The substrate transfer apparatus according to  claim 2 , wherein
 the cover is connected to the convex portion.   
     
     
         4 . The substrate transfer apparatus according to  claim 3 , wherein
 the cover comprises a plate that sandwiches the cover with the convex portion, and the plate is connected to the convex portion.   
     
     
         5 . The substrate transfer apparatus according to  claim 1 , wherein
 the cover comprises a material that expands and contracts.   
     
     
         6 . The substrate transfer apparatus according to  claim 1 , wherein
 the cover has an accordion structure.   
     
     
         7 . The substrate transfer apparatus according to  claim 6 , wherein
 there is a space between the cover and the shaft.   
     
     
         8 . The substrate transfer apparatus according to  claim 1 , wherein
 the cover has a cylindrical shape and covers a periphery of the shaft from a convex portion to the isolation wall.   
     
     
         9 . The substrate transfer apparatus according to  claim 1 , wherein
 the cover is connected to the shaft at the first end sealed from an external environment, and the second end is connected to the isolation wall sealed from the external environment.   
     
     
         10 . The substrate transfer apparatus according to  claim 1 , wherein
 the driver that drives the shaft is arranged in the internal region.   
     
     
         11 . The substrate transfer apparatus according to  claim 10 , wherein
 a sensor is arranged in the internal region.   
     
     
         12 . The substrate transfer apparatus according to  claim 1 , wherein
 the substrate transfer apparatus is used in a process using a liquid.   
     
     
         13 . A substrate transfer apparatus comprising:
 an end effector comprising:
 a hand gripping a substrate; and 
 a plunger that comes into contact with the substrate and performs alignment of the substrate comprising: 
 a contact portion that comes into contact with the substrate; and 
 an isolation wall that isolates an internal region from an outside, the internal region comprising a driver that drives a shaft, wherein 
   the isolation wall comprises a shaft hole through which the contact portion extends into the internal region, and   the contact portion comprises a cover in which a first end is connected to the contact portion and a second end is connected to the isolation wall.