Liquid supply device

Abstract

A liquid supply device for spraying liquid onto a workpiece or a jig for the workpiece. The liquid supply device includes an accommodation portion configured to accommodate the liquid, a pump configured to pump the liquid from the accommodation portion, a spray portion configured to suction the liquid pumped from the accommodation portion to spray the liquid onto the workpiece, a pump-side supply pipe connected to the accommodation portion, the pump-side supply pipe being configured to discharge, by a predetermined amount at a time, the liquid pumped by the pump, and a spray-side supply pipe including an upstream end portion into which the liquid discharged from the pump-side supply pipe flows and that is open to an atmosphere, and a downstream end portion configured to spray the liquid flowing from the upstream end portion via the spray portion.

What is claimed is: 
     
         1 . A liquid supply device for spraying liquid onto a workpiece or a jig for the workpiece, the liquid supply device comprising:
 an accommodation portion configured to accommodate the liquid;   a pump configured to pump the liquid from the accommodation portion;   a spray portion configured to suction the liquid pumped from the accommodation portion to spray the liquid onto the workpiece;   a pump-side supply pipe connected to the accommodation portion, the pump-side supply pipe being configured to discharge, by a predetermined amount at a time, the liquid pumped by the pump; and   a spray-side supply pipe including:
 an upstream end portion into which the liquid discharged from the pump-side supply pipe flows and that is open to an atmosphere; and 
 a downstream end portion configured to spray the liquid flowing from the upstream end portion via the spray portion. 
   
     
     
         2 . The liquid supply device according to  claim 1 ,
 wherein a downstream end portion of the pump-side supply pipe includes a discharge port configured to drop the liquid by a predetermined amount at a time, and   the upstream end portion of the spray-side supply pipe is connected to a container that opens toward the discharge port and is configured to temporarily accommodate the liquid dropped from the discharge port.   
     
     
         3 . The liquid supply device according to  claim 2 , further comprising:
 an optical sensor disposed on the container and configured to detect a droplet of the liquid dropped from the discharge port to the container,   wherein the optical sensor includes:
 a light projecting portion configured to project light in a direction intersecting a dropping direction in which the liquid is dropped from the discharge port to the container; and 
 a light receiving portion configured to receive the light projected from the light projecting portion. 
   
     
     
         4 . The liquid supply device according to  claim 3 ,
 wherein the spray portion is configured to spray the liquid, as a processing liquid, onto a surface of the workpiece to be ground or polished, or onto a surface of the jig for the workpiece.   
     
     
         5 . The liquid supply device according to  claim 1 , further comprising:
 wherein the liquid is a first liquid and the pump-side supply pipe is a first pump-side supply pipe,   the liquid supply device further comprises:
 a second accommodation portion configured to accommodate a second liquid different from the first liquid; 
 a second pump configured to pump the second liquid from the second accommodation portion; and 
 a second pump-side supply pipe connected to the second accommodation portion, the second pump-side supply pipe being configured to discharge, by a predetermined amount at a time, the second liquid pumped by the second pump, and 
   the first liquid discharged from the first pump-side supply pipe and the second liquid discharged from the second pump-side supply pipe flow into the upstream end portion of the spray-side supply pipe.