High flow liquid precursor heat exchanger

Abstract

In various embodiments, the disclosed subject-matter is a heat-exchanger device that includes a thermal mass and a number of flow channels formed within the thermal mass in a serpentine arrangement. The flow channels have straight portions with bends between fluidically coupling adjacent ones of the straight portions. Adjacent ones of the straight portions are substantially parallel to one another and provide fluidic flow paths in substantially opposite directions. A carrier-gas inlet port is coupled to an inlet of the flow channels to receive a carrier gas having liquid droplets contained therein. At least one heater is embedded into the thermal mass in thermal contact with the flow channels. The heater heats the carrier gas and vaporizes the liquid droplets to form a vapor. A fluid-outlet port is coupled to an outlet of the flow channels on an end opposite to the inlet. Other systems and methods are disclosed.

What is claimed is: 
     
         1 . A heat-exchanger device comprising:
 a thermal mass;   a first plurality of flow channels formed within the thermal mass in a serpentine arrangement, the first plurality of flow channels having straight portions with bends between the straight portions fluidically coupling adjacent ones of the straight portions, adjacent ones of the straight portions being substantially parallel to one another and configured to provide fluidic flow paths in substantially opposite directions in the adjacent ones of the straight portions;   a carrier-gas inlet port, coupled to an inlet of the first plurality of flow channels, and configured to receive a carrier gas having liquid droplets contained therein;   at least one heater embedded into the thermal mass in thermal contact with the first plurality of flow channels, the at least one heater being configured to heat the carrier gas and vaporize the liquid droplets to form a vapor; and   a fluid-outlet port, coupled to an outlet of the first plurality of flow channels, through which the vapor may exit the heat-exchanger device, the outlet of the first plurality of flow channels being on an end of the first plurality of flow channels opposite to the inlet of the first plurality of flow channels.   
     
     
         2 . The heat-exchanger device of  claim 1 , further comprising:
 a second plurality of flow channels formed on a second side of the thermal mass in a serpentine arrangement, the second plurality of flow channels having straight portions with bends between the straight portions fluidically coupling adjacent ones of the straight portions, adjacent ones of the straight portions being substantially parallel to one another and configured to provide fluidic flow paths in substantially opposite directions in the adjacent ones of the straight portions; and   a flow-path opening fluidically coupling the first plurality of flow channels with the second plurality of flow channels such that the second plurality of flow channels is located between the outlet of the first plurality of flow channels and the fluid-outlet port.   
     
     
         3 . The heat-exchanger device of  claim 1 , wherein the first plurality of flow channels is formed on a first side of the thermal mass. 
     
     
         4 . The heat-exchanger device of  claim 1 , further comprising a chase-gas inlet port configured to allow a chase gas into the first plurality of flow channels to mix with the carrier gas and the liquid droplets. 
     
     
         5 . The heat-exchanger device of  claim 4 , wherein the chase gas comprises an inert gas. 
     
     
         6 . The heat-exchanger device of  claim 4 , wherein the chase gas comprises a purge gas configured to clear the heat-exchanger device of a gas prior to changing to another gas for a subsequent process operation. 
     
     
         7 . The heat-exchanger device of  claim 4 , wherein, in operation, a dead volume within the heat-exchanger device is minimized due to at least one fluid selected from fluids including the carrier gas and the chase gas being configured to flow through the first plurality of flow channels. 
     
     
         8 . The heat-exchanger device of  claim 1 , wherein at least some of the at least one heaters comprise resistive-heating elements. 
     
     
         9 . The heat-exchanger device of  claim 1 , further comprising a thermal sensor, the thermal sensor being configured to provide an electrical output corresponding to a measured temperature of at least a portion of the thermal mass. 
     
     
         10 . The heat-exchanger device of  claim 1 , wherein the thermal mass includes stainless steel. 
     
     
         11 . A heat-exchanger device comprising:
 a thermal mass;   a first plurality of flow channels formed on a first side of the thermal mass in a serpentine arrangement;   a second plurality of flow channels formed on a second side of the thermal mass in a serpentine arrangement, each of the first plurality of flow channels and the second plurality of flow channels having straight portions with bends between the straight portions fluidically coupling adjacent ones of the straight portions, adjacent ones of the straight portions being substantially parallel to one another and configured to provide fluidic flow paths in substantially opposite directions in the adjacent ones of the straight portions;   a flow-path opening fluidically coupling the first plurality of flow channels with the second plurality of flow channels;   a carrier-gas inlet port, coupled to an inlet end of the first plurality of flow channels, and configured to receive a carrier gas having liquid droplets contained therein;   at least one heater embedded into the thermal mass in thermal contact with the first plurality of flow channels and the second plurality of flow channels, the at least one heater being configured to heat the carrier gas and vaporize the liquid droplets to form a vapor; and   a fluid-outlet port, coupled to an outlet end of the second plurality of flow channels, through which the vapor may exit the heat-exchanger device, the outlet of the second plurality of flow channels being on an end opposite to the inlet of the first plurality of flow channels.   
     
     
         12 . The heat-exchanger device of  claim 11 , further comprising a chase-gas inlet port coupled to the inlet end of the first plurality of flow channels and configured to allow a chase gas to mix with the carrier gas and the liquid droplets. 
     
     
         13 . The heat-exchanger device of  claim 11 , wherein at least some of the at least one heaters comprise resistive-heating elements. 
     
     
         14 . The heat-exchanger device of  claim 11 , further comprising a thermal sensor, the thermal sensor being configured to provide an electrical output corresponding to a measured temperature of at least a portion of the thermal mass. 
     
     
         15 . A heat-exchanger device comprising:
 a thermal mass;   a first plurality of flow channels formed within the thermal mass in a serpentine arrangement, the first plurality of flow channels having straight portions with bends between the straight portions fluidically coupling adjacent ones of the straight portions, adjacent ones of the straight portions being substantially parallel to one another and configured to provide fluidic flow paths in substantially opposite directions in the adjacent ones of the straight portions;   a carrier-gas inlet port, coupled to an inlet of the first plurality of flow channels, and configured to receive a carrier gas having liquid droplets contained therein;   a chase-gas inlet port configured to allow a chase gas into the first plurality of flow channels to mix with the carrier gas and the liquid droplets;   at least one heater embedded into the thermal mass in thermal contact with the first plurality of flow channels, the at least one heater being configured to heat the carrier gas and vaporize the liquid droplets to form a vapor; and   a fluid-outlet port, coupled to an outlet of the first plurality of flow channels, through which the vapor may exit the heat-exchanger device, the outlet of the first plurality of flow channels being on an end of the first plurality of flow channels opposite to the inlet of the first plurality of flow channels.   
     
     
         16 . The heat-exchanger device of  claim 15 , further comprising:
 a second plurality of flow channels formed on a second side of the thermal mass in a serpentine arrangement, the second plurality of flow channels having straight portions with bends between the straight portions fluidically coupling adjacent ones of the straight portions, adjacent ones of the straight portions being substantially parallel to one another and configured to provide fluidic flow paths in substantially opposite directions in the adjacent ones of the straight portions; and   a flow-path opening fluidically coupling the first plurality of flow channels with the second plurality of flow channels such that the second plurality of flow channels is located between the outlet of the first plurality of flow channels and the fluid-outlet port.   
     
     
         17 . The heat-exchanger device of  claim 15 , wherein the first plurality of flow channels is formed on a first side of the thermal mass. 
     
     
         18 . The heat-exchanger device of  claim 15 , wherein the chase gas comprises an inert gas. 
     
     
         19 . The heat-exchanger device of  claim 15 , wherein the chase gas comprises a purge gas configured to clear the heat-exchanger device of a gas prior to changing to another gas for a subsequent process operation. 
     
     
         20 . The heat-exchanger device of  claim 15 , wherein, in operation, a dead volume within the heat-exchanger device is minimized due to at least one fluid selected from fluids including the carrier gas and the chase gas being configured to flow through the first plurality of flow channels.