Carrier head membrane

Abstract

A carrier head membrane for use in a polishing head, comprising a main portion, a vertical portion, a horizontal portion, and an outer ring portion. The main portion is substantially flat and includes a working surface for contacting the backside of a wafer. The vertical portion extends substantially vertically from the main portion, the horizontal portion extends from the vertical portion, and the outer ring portion extends substantially vertically from an outer edge of the main portion. A plurality of pressurizable regional chambers are defined between the main portion and the polishing head, and a groove is formed at a circumferential junction portion between the main portion and the outer ring portion, recessed toward an inner wall surface of the circumferential junction portion and located within the regional chamber.

What is Claimed is: 
     
         1 . A carrier head membrane for use in a polishing head, comprising: 
 a main portion, the main portion being substantially flat and having a working surface for contacting a backside of a wafer;   a vertical portion extending substantially vertically from the main portion;   a horizontal portion extending from the vertical portion; and   an outer periphery portion extending substantially vertically from an outer edge of the main portion;   
       wherein a plurality of pressurizable regional chambers are provided and defined between the main portion and the polishing head, and a groove is provided in a circumferential junction portion between the main portion and the outer ring portion, which is located in the regional chamber and recessed toward an inner wall surface of the circumferential junction portion. 
     
     
         2 .The carrier head membrane of  claim 1 , wherein an angle provided between a recess direction of the groove and a plane of the main portion is other than zero. 
     
     
         3 .The carrier head membrane of  claim 1 , wherein the groove is extended along a substantially horizontal direction. 
     
     
         4 .The carrier head membrane of  claim 1 , wherein the groove is extended along a substantially vertical direction. 
     
     
         5.  The carrier head membrane of  claim 1 , wherein the circumferential junction portion includes an outer wall surface and a protrusion formed on the outer wall surface. 
     
     
         6 .The carrier head membrane of  claim 1 , wherein further includes a protruding structure located on an upper surface of the horizontal portion. 
     
     
         7 .The carrier head membrane of  claim 1 , wherein the main portion has a thickness that is not uniform across the entire main portion. 
     
     
         8 .The carrier head membrane of  claim 1 , wherein the main portion has a top surface which includes a plurality of regions, wherein the top surface of at least part of the regions is an inclined surface.  
     
     
         9 .The carrier head membrane of  claim 1 , wherein the horizontal portion is coupled to a thick rim portion.  
     
     
         10 .The carrier head membrane of  claim 1 , wherein the inner wall surface of the circumferential junction portion is an inclined surface.