Deposition mask, deposition apparatus including the same, method of manufacturing the same, and electronic device manufactured by using the same

Abstract

Provided are a deposition mask, a deposition apparatus including the same, a method of manufacturing the same, and an electronic device manufactured by using the same. The deposition mask includes a mask frame having cell openings and including a rib region defining the cell openings, a membrane including mask cell regions each disposed on the cell openings, and reflective patterns disposed on inner surfaces of the cell openings and reflecting thermal radiation energy.

What is claimed is: 
     
         1 . A deposition mask comprising:
 a mask frame having cell openings and comprising a rib region defining the cell openings;   a membrane comprising mask cell regions each disposed on the cell openings; and   reflective patterns disposed on inner surfaces of the cell openings and reflecting thermal radiation energy.   
     
     
         2 . The deposition mask of  claim 1 , wherein the reflective patterns are made of a metal or a metal oxide. 
     
     
         3 . The deposition mask of  claim 2 , wherein the reflective patterns comprise at least one of aluminum (Al), titanium (Ti), magnesium (Mg), zinc (Zn), cerium (Ce), tantalum (Ta), tungsten (W), molybdenum (Mo), chromium (Cr), nickel (Ni), ruthenium (Ru), palladium (Pd), platinum (Pt), gold (Au), silver (Ag), and copper (Cu). 
     
     
         4 . The deposition mask of  claim 2 , wherein the reflective patterns comprise at least one of aluminum oxide (Al 2 O 3 ), titanium oxide (TiO 2 ), magnesium oxide (MgO), zinc oxide (ZnO), and cerium oxide (CeO 2 ). 
     
     
         5 . The deposition mask of  claim 1 , wherein each of the inner surfaces of the cell openings has an inclination such that the cell openings have a width that gradually decreases toward the membrane. 
     
     
         6 . The deposition mask of  claim 1 , wherein the reflective patterns have a thickness in a range of about 10 nm to about 100 nm. 
     
     
         7 . The deposition mask of  claim 1 , further comprising:
 a reflective layer, wherein   the membrane is disposed on a front surface of the mask frame,   the reflective layer is disposed on a rear surface of the mask frame, and   the reflective layer and the reflective patterns are made of a same material.   
     
     
         8 . A deposition apparatus comprising:
 a deposition source;   a deposition mask disposed above the deposition source; and   a substrate chuck supporting a substrate such that the substrate faces the deposition mask,   wherein the deposition mask comprises:
 a mask frame having cell openings and comprising a rib region defining the cell openings; 
 a membrane comprising mask cell regions each disposed on the cell openings; and 
 reflective patterns disposed on inner surfaces of the cell openings and reflecting thermal radiation energy. 
   
     
     
         9 . The deposition apparatus of  claim 8 , wherein the reflective patterns are made of a metal or a metal oxide. 
     
     
         10 . The deposition apparatus of  claim 8 , wherein each of the inner surfaces of the cell openings has an inclination such that the cell openings have a width that gradually decreases toward the membrane. 
     
     
         11 . The deposition apparatus of  claim 8 , wherein
 the deposition mask further comprises a reflective layer,   the membrane is disposed on a front surface of the mask frame,   the reflective layer is disposed on a rear surface of the mask frame, and   the reflective layer and the reflective patterns are made of a same material.   
     
     
         12 . The deposition apparatus of  claim 8 , further comprising:
 a mask stage which is disposed above the deposition source and on which the deposition mask is placed,   wherein the mask stage comprises:
 a lattice support supporting the rib region of the mask frame; and 
 a mask chuck having a ring shape surrounding the lattice support in a plan view and supporting an edge portion of the mask frame. 
   
     
     
         13 . The deposition apparatus of  claim 12 , wherein the lattice support and the reflective patterns are made of a same material. 
     
     
         14 . The deposition apparatus of  claim 12 , wherein
 the mask stage further comprises a coating layer disposed on the lattice support, and   the coating layer and the reflective patterns are made of a same material.   
     
     
         15 . A method of manufacturing a deposition mask, comprising:
 forming an inorganic layer on a substrate;   patterning the inorganic layer to form mask cell regions each having a plurality of pixel openings exposing the substrate;   patterning the substrate to form cell openings each exposing the mask cell regions; and   forming reflective patterns made of a material reflecting thermal radiation energy on inner surfaces of the cell openings.   
     
     
         16 . The method of  claim 15 , wherein the reflective patterns are made of a metal or a metal oxide. 
     
     
         17 . The method of  claim 15 , wherein
 the substrate is a single crystal silicon substrate, and   the cell openings are formed by a wet etching process to have a width that gradually decreases toward the inorganic layer.   
     
     
         18 . The method of  claim 17 , wherein the reflective patterns are formed by an electron beam evaporation process using a shadow mask that exposes the inner surfaces of the cell openings. 
     
     
         19 . The method of  claim 15 , further comprising:
 forming a reflective layer on a rear surface of the substrate, wherein   the inorganic layer is formed on a front surface of the substrate, and   the reflective layer and the reflective patterns are made of a same material and formed simultaneously.   
     
     
         20 . An electronic device comprising:
 a display panel comprising a substrate and light emitting layers formed on the substrate using a deposition mask that comprises:   a mask frame having cell openings and comprising a rib region defining the cell openings;   a membrane comprising mask cell regions each disposed on the cell openings; and   reflective patterns disposed on inner surfaces of the cell openings and reflecting thermal radiation energy.