Information processing apparatus, information processing method, and substrate processing apparatus

Abstract

An information processing apparatus including: an acquisition unit that acquires a process log for each execution of the same process including a plurality of process steps in one or more substrate processing apparatuses that execute the process according to a recipe; an analysis unit that compares, based on the process logs, step times taken for the same process step and analyzes a process step having time variation as time-variable step; and a display control unit that displays information related to the time-variable step.

What is claimed is: 
     
         1 . An information processing apparatus comprising:
 acquisition circuitry configured to acquire a process log for each execution of a process including a plurality of process steps in one or more substrate processing apparatuses that execute the process according to a recipe;   analysis circuitry configured to compare, based on the process logs, step times taken for the same process step and analyze a process step having time variation as a time-variable step; and   display control circuitry configured to display information related to the time-variable step.   
     
     
         2 . The information processing apparatus of  claim 1 , wherein the analysis circuitry are configured to analyze the process step having the time variation as the time-variable step when a difference in step time taken for the same process step is equal to or greater than a predetermined time. 
     
     
         3 . The information processing apparatus of  claim 1 , wherein the display control circuitry are configured to collect and display the step time taken for the time-variable step for each execution of the process, in a manner that allows comparison. 
     
     
         4 . The information processing apparatus of  claim 1 , wherein the display control circuitry are configured to collect and display the step time taken for the time-variable step for each of the one or more substrate processing apparatuses, in a manner that allows comparison. 
     
     
         5 . The information processing apparatus of  claim 1 , wherein the display control circuitry are configured to collect and display the step time taken for the time-variable step for each type of time-variable step, in a manner that allows comparison. 
     
     
         6 . The information processing apparatus of  claim 1 , wherein the display control circuitry is configured to display a distribution of the step times taken for the time-variable step for each type of time-variable step and each of the one or more substrate processing apparatuses, in a manner that allows comparison. 
     
     
         7 . The information processing apparatus of  claim 1 , wherein each time-variable step is a process step that is completed when a situation of a corresponding one of the substrate processing apparatuses reaches a predetermined condition after execution of the process has started in accordance with the recipe. 
     
     
         8 . The information processing apparatus of  claim 1 , wherein each time-variable step includes at least one of:
 a transfer time for transferring wafers from a sealed storage container to a boat in the substrate processing apparatus;   a time until temperature stabilization after the boat is loaded into a processing container;   a time required to reduce pressure in the processing container from atmospheric pressure to a process pressure; and   a time required to increase temperature in the processing container from a loading temperature to a process temperature.   
     
     
         9 . An information processing method performed by an information processing apparatus, the information processing method comprising:
 acquiring a process log for each execution of a process including a plurality of process steps in one or more substrate processing apparatuses that execute the process according to a recipe;   comparing, based on the process logs, step times taken for the same process step and analyzing a process step having time variation as a time-variable step; and   displaying information related to the time-variable step.   
     
     
         10 . A substrate processing apparatus comprising:
 acquisition circuitry configured to acquire a process long for each execution of a process including a plurality of process steps in one or more substrate processing apparatuses that execute the process according to a recipe;   analysis circuitry configured to compare, based on the process logs, step times taken for the same process step and analyze a process step having time variation as time-variable step; and   display control circuitry configured to display information related to the time-variable step.