Fluid control apparatus

Abstract

A fluid control apparatus includes a vibration unit, a housing, and a top-surface part. The vibration unit includes a piezoelectric device, a plate member on which the piezoelectric device is disposed, a frame plate surrounding a periphery of the plate member, and a coupling part coupling the plate member to the frame plate, the coupling part being configured to vibrate. The housing includes an annular side wall and a bottom wall. The top-surface part is coupled to the side wall of the housing and disposed apart from the bottom wall. The vibration unit is disposed in an internal space formed by being surrounded by the side wall, the bottom wall, and the top-surface part. The top-surface part includes a main body including a principal surface opposed to the plate member, and a support body supporting the main body.

1 . A fluid control apparatus comprising:
 a vibration unit including:
 a piezoelectric material; 
 a plate member on which the piezoelectric material is disposed; 
 a frame plate surrounding a periphery of the plate member; and 
 a coupling part coupling the plate member to the frame plate, the coupling part being configured to vibrate; 
   a housing including an annular side wall and a bottom wall; and   a top-surface part coupled to the side wall of the housing and disposed apart from the bottom wall, wherein   the vibration unit is disposed in an internal space surrounded by the side wall, the bottom wall, and the top-surface part,   the top-surface part includes:
 a main body including a principal surface opposed to the plate member; and 
 a support body supporting the main body, 
   the support body includes a wall protruding in a direction toward the bottom wall with respect to the principal surface to have a given height, and   the principal surface includes a portion exposed to the internal space.   
     
     
         2 . The fluid control apparatus according to  claim 1 , wherein the main body is a metal plate. 
     
     
         3 . The fluid control apparatus according to  claim 1 , wherein the main body has a thermal expansion coefficient higher than a thermal expansion coefficient of the support body. 
     
     
         4 . The fluid control apparatus according to  claim 3 , wherein the support body supports an outer side surface of the main body. 
     
     
         5 . The fluid control apparatus according to  claim 1 , wherein an exposed surface of the principal surface to the internal space has a six or more-sided polygonal shape. 
     
     
         6 . The fluid control apparatus according to  claim 1 , wherein a side wall surface of the wall protruding from the principal surface includes unevenness. 
     
     
         7 . The fluid control apparatus according to  claim 1 , wherein the plate member includes a surface closer to the top-surface part and a surface on an opposite side from the top-surface part, and
 the piezoelectric material is disposed on the surface closer to the top-surface part.   
     
     
         8 . The fluid control apparatus according to  claim 1 , wherein the plate member includes a surface closer to the top-surface part and a surface on an opposite side from the top-surface part, and
 the piezoelectric material is disposed on the surface on the opposite side from the top-surface part.   
     
     
         9 . The fluid control apparatus according to  claim 2 , wherein the main body has a thermal expansion coefficient higher than a thermal expansion coefficient of the support body. 
     
     
         10 . The fluid control apparatus according to  claim 2 , wherein an exposed surface of the principal surface to the internal space has a six or more-sided polygonal shape. 
     
     
         11 . The fluid control apparatus according to  claim 3 , wherein an exposed surface of the principal surface to the internal space has a six or more-sided polygonal shape. 
     
     
         12 . The fluid control apparatus according to  claim 4 , wherein an exposed surface of the principal surface to the internal space has a six or more-sided polygonal shape. 
     
     
         13 . The fluid control apparatus according to  claim 2 , wherein a side wall surface of the wall protruding from the principal surface includes unevenness. 
     
     
         14 . The fluid control apparatus according to  claim 3 , wherein a side wall surface of the wall protruding from the principal surface includes unevenness. 
     
     
         15 . The fluid control apparatus according to  claim 4 , wherein a side wall surface of the wall protruding from the principal surface includes unevenness. 
     
     
         16 . The fluid control apparatus according to  claim 5 , wherein a side wall surface of the wall protruding from the principal surface includes unevenness. 
     
     
         17 . The fluid control apparatus according to  claim 2 , wherein the plate member includes a surface closer to the top-surface part and a surface on an opposite side from the top-surface part, and
 the piezoelectric material is disposed on the surface closer to the top-surface part.   
     
     
         18 . The fluid control apparatus according to  claim 3 , wherein the plate member includes a surface closer to the top-surface part and a surface on an opposite side from the top-surface part, and
 the piezoelectric material is disposed on the surface closer to the top-surface part.   
     
     
         19 . The fluid control apparatus according to  claim 4 , wherein the plate member includes a surface closer to the top-surface part and a surface on an opposite side from the top-surface part, and
 the piezoelectric material is disposed on the surface closer to the top-surface part.   
     
     
         20 . The fluid control apparatus according to  claim 5 , wherein the plate member includes a surface closer to the top-surface part and a surface on an opposite side from the top-surface part, and
 the piezoelectric material is disposed on the surface closer to the top-surface part.