Workpiece processing preparation method and processing method

Abstract

A processing method of thinning a sheet-shaped workpiece having an outer peripheral groove formed in an outer peripheral edge portion of a top surface thereof. The method includes the steps of: laying an adhesive material on a top surface of a supporting substrate; causing the sheet-shaped workpiece to face the adhesive material; pressing the adhesive material with the top surface of the workpiece to press-spread the adhesive material between the workpiece and the supporting substrate, and to fill the outer peripheral groove with the adhesive material; hardening the adhesive material with an external stimulus to form a laminated body; holding the supporting substrate side of the laminated body on a holding table to expose a back surface of the workpiece; and grinding the back surface of the workpiece with a grinding stone to thin the workpiece to a predetermined thickness.

What is claimed is: 
     
         1 . A workpiece processing preparation method comprising:
 an adhesive material laying step of laying an adhesive material on a top surface of a supporting substrate;   a facing step of causing a sheet-shaped workpiece having an outer peripheral groove formed in an outer peripheral edge portion of a top surface thereof to face the adhesive material;   a pressing step of pressing the adhesive material with the top surface of the workpiece to press-spread the adhesive material between the workpiece and the supporting substrate, and fill the outer peripheral groove with the adhesive material; and   a laminated body forming step of hardening the adhesive material with an external stimulus to form a laminated body.   
     
     
         2 . The workpiece processing preparation method of  claim 1 , further comprising:
 a trimming step of removing, to form the outer peripheral groove in the outer peripheral edge portion of the top surface of the workpiece, a portion of an edge of the outer peripheral edge portion of the workpiece to form the outer peripheral groove.   
     
     
         3 . The workpiece processing preparation method of  claim 1 , wherein the adhesive material contains an abrasive grain. 
     
     
         4 . A processing method comprising:
 an adhesive material laying step of laying an adhesive material on a top surface of a supporting substrate;   a facing step of causing a sheet-shaped workpiece having an outer peripheral groove formed in an outer peripheral edge portion of a top surface thereof to face the adhesive material;   a pressing step of pressing the adhesive material with the top surface of the workpiece to press-spread the adhesive material between the workpiece and the supporting substrate, and fill the outer peripheral groove with the adhesive material;   a laminated body forming step of hardening the adhesive material with an external stimulus to form a laminated body;   a holding step of holding the supporting substrate side of the laminated body on a holding table to expose a back surface of the workpiece; and   a grinding step of grinding the back surface of the workpiece with a grinding stone to thin the workpiece to a predetermined thickness.   
     
     
         5 . The processing method of  claim 4 , further comprising:
 a trimming step of removing, to form the outer peripheral groove in the outer peripheral edge portion of the top surface of the workpiece, a portion of an edge of the outer peripheral edge portion of the workpiece to form the outer peripheral groove.   
     
     
         6 . The processing method of  claim 4 , wherein the adhesive material contains an abrasive grain. 
     
     
         7 . The processing method of  claim 6 , wherein, in the grinding step, the workpiece is thinned until the adhesive material is ground. 
     
     
         8 . The processing method of  claim 5 , wherein the adhesive material contains an abrasive grain. 
     
     
         9 . The workpiece processing preparation method of  claim 2 , wherein the adhesive material contains an abrasive grain.