Package structure including heat sink structure and method for manufacturing the same

Abstract

The present application discloses a package structure and a method for manufacturing the package structure. The package structure includes an electronic device and a heat sink structure. The heat sink structure is disposed over the electronic device, and includes a base portion, a plurality of thermal vias and a thermally conductive layer. The thermal vias extends through the base portion. The thermally conductive layer is disposed between the base portion and the electronic device. The thermal vias are thermally connected to the electronic device through the thermally conductive layer so as to dissipate a heat generated from the electronic device.

What is claimed is: 
     
         1 . A package structure, comprising:
 an electronic device; and   a heat sink structure disposed over the electronic device, and comprising:
 a thermally conductive layer; 
 a plurality of thermal vias connecting to a second surface of the thermally conductive layer; and 
 a plurality of pads connecting to a first surface of the thermally conductive layer, wherein the plurality of pads are thermally connected to the electronic device so as to dissipate a heat generated from the electronic device to the thermal vias through the thermally conductive layer. 
   
     
     
         2 . The package structure of  claim 1 , wherein the heat sink structure is attached to the electronic device by hybrid bonding. 
     
     
         3 . The package structure of  claim 1 , wherein the thermally conductive layer has a net shape. 
     
     
         4 . The package structure of  claim 3 , wherein the thermally conductive layer includes a plurality of lines crossed with each other to form a plurality of intersection portions. 
     
     
         5 . The package structure of  claim 4 , wherein the plurality of thermal vias are connected to the plurality of intersection portions of the thermally conductive layer. 
     
     
         6 . The package structure of  claim 1 , wherein the heat sink structure further comprises a protection material encapsulating the plurality of thermal vias. 
     
     
         7 . The package structure of  claim 1 , wherein a lateral surface of the heat sink structure is substantially aligned with a lateral surface of the electronic device. 
     
     
         8 . The package structure of  claim 1 , wherein the electronic device comprises:
 a first semiconductor chip;   a second semiconductor chip stacked on and electrically connected to the first semiconductor chip;   a third semiconductor chip stacked on and electrically connected to the second semiconductor chip;   a fourth semiconductor chip stacked on and electrically connected to the third semiconductor chip; and   an encapsulant encapsulating the first semiconductor chip, the second semiconductor chip, the third semiconductor chip and the fourth semiconductor chip.   
     
     
         9 . A manufacturing method, comprising:
 providing an electronic device;   providing a heat sink structure, wherein the heat sink structure includes a base portion, a plurality of thermal vias disposed in the base portion and a thermally conductive layer connecting the plurality of thermal vias; and   thermally connecting the heat sink structure to the electronic device, wherein the thermally conductive layer is disposed between the base portion and the electronic device.   
     
     
         10 . The method of  claim 9 , wherein the plurality of thermal vias connect to a second surface of the thermally conductive layer, and the heat sink structure includes a plurality of pads connecting to a first surface of the thermally conductive layer, wherein the step of thermally connecting the heat sink structure to the electronic device is thermally connecting the plurality of pads to the electronic device. 
     
     
         11 . The method of  claim 9 , wherein the step of thermally connecting the heat sink structure to the electronic device is attaching the heat sink structure to the electronic device by hybrid bonding. 
     
     
         12 . The method of  claim 9 , wherein the step of providing the heat sink structure includes:
 providing the base portion;   forming the plurality of thermal vias in the base portion; and   forming the thermally conductive layer on the base portion to connect the plurality of thermal vias.   
     
     
         13 . The method of  claim 9 , further comprising:
 thinning the base portion to expose the plurality of thermal vias.